Cleanroom Work Support Component Areas

  • Alvin Lieberman


Satisfactory cleanroom operations require adequate support components. The same care in design required for the cleanroom proper must also be used in layout of all ancillary and support areas. All items that enter or leave and activities that are carried out in the cleanroom must pass through, are stored in, or are processed in one of these auxiliary support areas. Whenever possible, the support areas are located and maintained out of the cleanroom, but some items must be within the work area. The support areas include facilities for personnel activities, for process materials, for process equipment and tool storage and maintenance, for in-process products, and for cleanroom maintenance. The support areas often contain components that can degrade cleanliness in the work area. Operation of these components must be controlled so that contamination of products within the support area is minimized and transport of contamination from these components to the cleanroom is avoided.


Support Area Support Component Clean Bench Reverse Osmosis Unit Tool Cleaning 
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© Van Nostrand Reinhold 1992

Authors and Affiliations

  • Alvin Lieberman

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