Standards for Contamination Control Areas

  • Alvin Lieberman


The objective of standards and specifications used for contamination control is to establish controls and definitions that will allow satisfactory cleanroom construction and good product fabrication within cleanrooms. Application of the standards permits exchange of definitions and conditions so that a cleanroom design, performance, and operation can be understood in any area as long as it is defined in accordance with accepted standards. The standards and specifications apply to the design, construction, performance, and operation of the cleanroom. The standards are necessary because design engineers, contractors, equipment manufacturers, materials suppliers, process tool producers, cleanroom owners, quality control managers, and product purchasers are all involved with cleanroom operation and must understand one another. Contamination control document standards must define clearly and acceptably:
  • Cleanliness levels for the cleanroom and the product

  • Conditions when measurements are to be made

  • Design and construction requirements for the cleanroom and for components used within the cleanroom

  • Airflow and environmental conditions within the room

  • Materials and tools allowed within the cleanroom for processing and manufacturing

  • Test methods for definition of cleanroom quality

  • Personnel training and activity requirements


Contamination Control Optical Particle Counter Flow Control System Current Good Manufacture Practice Cleanliness Level 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Van Nostrand Reinhold 1992

Authors and Affiliations

  • Alvin Lieberman

There are no affiliations available

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