Gas Cleaning Methods for Ambient Air and Compressed Gases

  • Alvin Lieberman


Cleaning air or compressed gases in cleanroom installations requires removal of particulate and/or gaseous contaminants. The technology used for cleaning gases for the cleanroom is derived from processes long used in industrial applications for dust and smoke removal. Removal of particles from gases in industrial applications may involve methods such as centrifugal cleaning, wet scrubbing, electrostatic precipitation, or filtration as used for fossil fuel power plant emission control. For cleanroom operations, filtration is essentially the only process by which particles are removed from both ambient air and from compressed gases; contaminant gases are removed either by dry bed adsorption or by wet scrubbing. Electrostatic precipitation is practically never used in cleanroom operation for control of ambient air cleanliness. The method is considered suspect because operators are concerned about possible particle emission from precipitator elements in the case of power failure. However, there is increasing interest in electrostatically augmented filtration. This process operates by improving particle deposition to the filter fibers. Even if a power failure occurs, the material already collected within the filter remains there. More details are given later.


Filter Medium Work Area Filtration Efficiency Electrostatic Precipitation Face Velocity 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. Accomazzo, M. A., 1986. Particulate Retention and Shedding Characteristics from Point-of-Use Process Gas Filters. Proceedings of the 4th Millipore SEMI Symposium, May 19, 1986, San Mateo, CA.Google Scholar
  2. Accomazzo, M. A., Rubow, K. L., & Liu, B. Y. H., 1984. Ultrahigh Efficiency Membrane Filters for Semiconductor Gases. Solid State Technology 27(3): 141–146.Google Scholar
  3. Bourscheid, G., & Bertholdt, H., 1990. How Production Technologies Influence Surface Quality of Ultraclean Gas-Supply Equipment: Requirements for Surface Quality. Microcontamination 8(2):41–43.Google Scholar
  4. Chahine, J. J., et al., 1989. Evaluating the Effect of Various Process Gases on Filter Performance. Microcontamination 7(8): 19–25.Google Scholar
  5. Fray, A. H., 1984. Change in Room Aerosol Concentration by In-Duct Complex Electric Fields. Journal of Environmental Science 27(1): 34–36.Google Scholar
  6. Hardwick, S. J., Lorenz, R. G., & Weber, D. K., 1988. Ensuring Gas Purity at the Point-of-Use. Solid State Technology 31(10):93–96.Google Scholar
  7. Hardy, T. K., Christman, O. D., & Shay, R. H., 1988. Measurement and Control of Particle Contamination in High Purity Cylinder Gases. Solid State Technology 31(10):83–87.Google Scholar
  8. Huffman, T. R., Nichols, G., & Bossard, P. R., 1988. Room Ionization: Can It Significantly Reduce Particle Contamination? Proceedings of the 9th International Committee of Contamination Control Societies Conference, pp. 304–312, September 26, 1988, Los Angeles.Google Scholar
  9. Institute of Environmental Sciences, 1983. Recommended Practice for Gas-Phase Adsorber Cells, IES-RP-CC-008-83T. Mt. Prospect, IL:Institute of Environmental Sciences.Google Scholar
  10. Jensen, D., & Goldsmith, S., 1987. Evaluation of Critical Gasline Filters. Journal of Environmental Sciences 30(6): 39–43.Google Scholar
  11. Jots, M. G., & Liberia, A., 1989. Method for Measuring Particles from Air Ionization Equipment. Proceedings of the 35th Institute of Environmental Science Annual Technical Meeting, pp. 328–332, May 1989, Anaheim, CA.Google Scholar
  12. Kasper, G., & Wen, H. Y., 1986. A Gas Filtration System for Concentrations of 10−5 Particles/cm3. Aerosol Science and Technology 5(2): 167–185.CrossRefGoogle Scholar
  13. Kroll, W., 1984. Contamination Prevention and Protection for Process Gases. Solid State Technology 27(5):220–227.Google Scholar
  14. Langmuir, I., 1942. Report on Smokes and Fibers, Sec. I. U.S. Office of Science Research and Development. No. 865, Part IV, pp. 394–436.Google Scholar
  15. Lee, K. W., & Liu, B. Y. H., 1980. On the Minimum Efficiency and the Most Penetrating Particle Size for Fibrous Filters. Air Pollution Control Association Journal 30(4):377–381.Google Scholar
  16. Lee, K. W., & Liu, B. Y. H., 1982. Theoretical Study of Aerosol Filtration by Fibrous Filters. Aerosol Science and Technology 1(2): 147–162.MathSciNetCrossRefGoogle Scholar
  17. Liu, B. Y. H., and Hsieh, K. C, 1989. Progress towards an Absolute Zero Particle Gas. Proceedings of the 35th Institute of Environmental Sciences Annual Technical Meeting, pp. 397–400, September 1989, Anaheim, CA.Google Scholar
  18. Rubow, K. L., 1981. Submicron Aerosol Filtration Characteristics of Membrane Filters. Ph.D. Thesis, University of Minnesota Mechanical Engineering Department. 1981.Google Scholar
  19. Rubow, K. L., Liu, B. Y. H., & Grant, D. C., 1988. Characteristics of Ultra-High Efficiency Membrane Filters in Gas Applications. Journal of Environmental Science 31(3):26–30.Google Scholar
  20. Sugiyama, K., & Ohmi, T., 1988. ULSI Fab Must Begin with Ultra-Clean Nitrogen System. Microcontamination 6(1):49–54.Google Scholar
  21. Thorogood, R. M., et al., 1986. Production of Ultrapure Nitrogen for the Electronics Industry. Microcontamination 4(8):28–35.Google Scholar

Copyright information

© Van Nostrand Reinhold 1992

Authors and Affiliations

  • Alvin Lieberman

There are no affiliations available

Personalised recommendations