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Characterisation of Diamond and Diamond-Like Films

  • P. R. Chalker
Part of the NATO ASI Series book series (NSSB, volume 266)

Abstract

The development of both CVD and PVD technologies for the deposition of diamond and diamond-like carbon (DLC) films has provided a wide range of materials for potential applications in optical, electronic and tribological fields. The range of materials produced by these deposition technologies arise partly from the allotropy of carbon and also from the possibility of forming hydrogenated materials which are widely classified as α-C:H ceramics. Analytical techniques for characterising these materials are important in as much as they may define the product of a set of particular process parameters and that they relate macroscopic properties of the films such as hardness, electrical and thermal conductivity, or optical transparency to microscopic properties such as phase composition, defect structures, impurities and microstructure.By understanding the relationships between macroscopic and microscopic properties, films with optimal behaviour can be produced to meet the requirements of a specific application.

Keywords

Diamond Film Pyrolytic Graphite Target Atom Material Research Society Natural Diamond 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • P. R. Chalker
    • 1
  1. 1.Materials & Manufacturing Technology DivisionAEA Industrial Technology, Harwell LaboratoryDidcot, OxfordshireUK

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