Radiation Response of Diamond Films
Diamond is expected to be a radiation hardened material due to its tight bonding. In this work, we are reporting the total dose response of CVD diamond films, 2 μm thick, grown on 3″ p-type silicon wafers, in terms of electrical parameters such as conductivity and high frequency capacitance. It is proposed that diamond be used as a buried insulating layer in a silicon-on-insulator (SOI) technology.
KeywordsDiamond Film Capacitive Current Threshold Voltage Shift Total Leakage High Frequency Capacitance
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