Radiation Response of Diamond Films

  • N. K. Annamalai
  • Reginald F. Blanchard
  • Joseph Chapski
Part of the NATO ASI Series book series (NSSB, volume 266)


Diamond is expected to be a radiation hardened material due to its tight bonding. In this work, we are reporting the total dose response of CVD diamond films, 2 μm thick, grown on 3″ p-type silicon wafers, in terms of electrical parameters such as conductivity and high frequency capacitance. It is proposed that diamond be used as a buried insulating layer in a silicon-on-insulator (SOI) technology.


Diamond Film Capacitive Current Threshold Voltage Shift Total Leakage High Frequency Capacitance 
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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • N. K. Annamalai
    • 1
  • Reginald F. Blanchard
    • 1
  • Joseph Chapski
    • 1
  1. 1.Solid State Sciences DirectorateRome Air Development CenterUSA

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