Abstract
Diamond exhibits remarkable physical and chemical properties that have attracted attention from scientists and engineers for a long time. The invention of chemical vapor deposition (CVD) techniques for the deposition of diamond on foreign substrates at low pressures, i.e., atmospheric or subatmospheric pressures, and low temperatures, i.e., below 1000°C, has further stimulated a great deal of interest for researchers to optimize the deposition processes for practical application of the remarkable diamond thin films.
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© 1991 Plenum Press, New York
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Tzeng, Y. et al. (1991). Electrical and Optical Properties of Diamond Films Deposited from an Oxy-Acetylene Flame. In: Clausing, R.E., Horton, L.L., Angus, J.C., Koidl, P. (eds) Diamond and Diamond-like Films and Coatings. NATO ASI Series, vol 266. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5967-8_60
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DOI: https://doi.org/10.1007/978-1-4684-5967-8_60
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