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Electrical and Optical Properties of Diamond Films Deposited from an Oxy-Acetylene Flame

  • Yonhua Tzeng
  • Chin K. Teh
  • Richard Phillips
  • Alvin Joseph
  • Teradol Srivinyunon
  • Calvin Cutshaw
  • Chin C. Tin
  • Richard Miller
  • Tom H. Hartnett
  • Chuck Willingham
  • Amin Ibrahim
  • B. H. Loo
Part of the NATO ASI Series book series (NSSB, volume 266)

Abstract

Diamond exhibits remarkable physical and chemical properties that have attracted attention from scientists and engineers for a long time. The invention of chemical vapor deposition (CVD) techniques for the deposition of diamond on foreign substrates at low pressures, i.e., atmospheric or subatmospheric pressures, and low temperatures, i.e., below 1000°C, has further stimulated a great deal of interest for researchers to optimize the deposition processes for practical application of the remarkable diamond thin films.

Keywords

Electrical Resistivity Diamond Film High Electrical Resistivity Chemical Vapor Deposition Diamond Diamond Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • Yonhua Tzeng
    • 1
  • Chin K. Teh
    • 1
  • Richard Phillips
    • 1
  • Alvin Joseph
    • 1
  • Teradol Srivinyunon
    • 1
  • Calvin Cutshaw
    • 1
  • Chin C. Tin
    • 2
  • Richard Miller
    • 3
  • Tom H. Hartnett
    • 3
  • Chuck Willingham
    • 3
  • Amin Ibrahim
    • 4
  • B. H. Loo
    • 4
  1. 1.Plasma Processing LaboratoryDepartment of Electrical Engineering Auburn UniversityAuburnUSA
  2. 2.Department of PhysicsAuburn UniversityAuburnUSA
  3. 3.Advanced Materials Department Research DivisionRaytheon CompanyLexingtonUSA
  4. 4.Department of ChemistryUniversity of AlabamaHuntsvilleUSA

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