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Reactive Gas Glow Discharges

  • J. W. Coburn
Part of the NATO ASI Series book series (NSSB, volume 266)

Abstract

In the last twenty years or so there has been an enormous growth in the use of reactive gas glow discharges for the processing of surfaces. Surface processing in this context can be divided into three major categories: deposition, etching and surface modification. Deposition and etching are terms which are well understood by most technically trained people but surface modification is a less familiar expression. The term surface modification is used to describe those processes which alter the physical and/or chemical characteristics of a pre-existing solid surface and in which this alteration is limited to a region relatively near the surface of the solid. Examples of surface modification processes are plasma oxidation, plasma nitriding and surface texturing. Some areas of technology in which reactive gas glow discharges play a major role are microelectronics, magnetic and optical recording technologies, photovoltaics, architectural glass, and machine tool fabrication.

Keywords

Glow Discharge Etch Rate Plasma Processing Diamond Film Plasma Polymerization 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • J. W. Coburn
    • 1
  1. 1.IBM Almaden Research CenterSan JoseUSA

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