Advertisement

Diamond Crystal Growth by Hot Filament CVD and Its Characterization

  • P. Ascarelli
  • S. Fontana
  • E. Molinari
  • R. Polini
  • V. Sessa
  • M. L. Terranova
  • E. Cappelli
Part of the NATO ASI Series book series (NSSB, volume 266)

Abstract

An ever increasing research effort has been devoted to the low pressure and temperature deposition of thin diamond films, since its realization has been proved and widely confirmed in the last few years. The reason for this may be largely related to the expectation for a wide set of potential applications, ranging from diamond protective coatings, to heat sinks, to optical and semiconductor devices, all of them exploiting in some way the unique combination of mechanical, optical, thermal, chemical, and electrical properties of diamond.1 Moreover, recent progress in the processing of diamond and diamond-like carbon coatings has already resulted in development and commercial success.2

Keywords

Diamond Film Electron Energy Loss Spectrum Thin Diamond Film Molybdenum Metal Substrate Deposition Temperature 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    W. A. Yarbrough and R. Messier, Science 247: 688 (1990).ADSCrossRefGoogle Scholar
  2. 2.
    J. C. Angus et al., MRS Bull. 14: 38 (1989).Google Scholar
  3. 3.
    D. V. Fedosayev et al., Part I. and B. V. Deryagin and D. V. Fedosayev, Part II, Surface and Coating Technol. 38: (1989).Google Scholar
  4. 4.
    D. N. Belton et al., Appl. Phys. Lett. 54: 416 (1989).ADSCrossRefGoogle Scholar
  5. 5.
    D. N. Belton et al., Surf. Sci. 233: 131 (1990).ADSCrossRefGoogle Scholar
  6. 6.
    B. Williams et al., in Proc. NATO-ASI on “Diamond and Diamond-Like Films and Coatings,” Castelvecchio Pascoli, Italy, July 23-Aug. 3, 1990 (private communications).Google Scholar
  7. 7.
    P. G. Lurie and J. M. Wilson, Surf. Sci. 65: 476 (1977).ADSCrossRefGoogle Scholar
  8. 8.
    F. R. McFeely et al., Phys. Rev. B9: 5268 (1974).Google Scholar
  9. 9.
    R. Meilunas et al., Appl. Phys. Lett. 54: 2204 (1969).ADSCrossRefGoogle Scholar
  10. 10.
    B. E. Williams et al., pp. 202–214 in Proc. First Intern. Conf. Diamond and Diamond-Like Films, J. P. Dismukes, A. J. Purdes, B. S. Meyerson, T. D. Moustakas, K. E. Spear, K. V. Ravi, and M. Yoder (eds.), The Electrochemical Society, Inc., Pennington, NJ, 1989.Google Scholar

Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • P. Ascarelli
    • 1
  • S. Fontana
    • 1
  • E. Molinari
    • 2
  • R. Polini
    • 2
  • V. Sessa
    • 2
  • M. L. Terranova
    • 2
  • E. Cappelli
    • 3
  1. 1.C.N.R. I.M.A.I.Monterotondo Scalo (Rome)Italy
  2. 2.Dip. Scienze e Tecnologie ChimicheII Universita’ di Roma “Tor Vergata”RomeItaly
  3. 3.ENIRicercheMonterotondo (Rome)Italy

Personalised recommendations