Thermal Wave and Raman Measurement of Polycrystalline Diamond Film Quality
The measurement of the thermal properties of thin films and small samples are difficult, if not impossible, when using conventional thermal measurement techniques [1–3]. Such methods typically require extensive sample preparation and have many potential sources of error (e.g. contacts, absolute temperature measurement, emissivity, etc.). Measurement of the thermal conductivity of a thin film is especially difficult, when that film resides on a substrate that also has a reasonably good thermal conductivity, such as polycrystalline diamond on silicon. In this paper, we present a brief introduction to the Mirage Effect Thermal Wave Technique and demonstrate the application of that technique to the making of such thin polycrystalline diamond film measurements. We present experimental results for polycrystalline diamond films on silicon that show that a correlation exists between the “graphitic” content of a thin diamond film, as estimated by Raman spectroscopy, and the thermal diffusivity (conductivity) of those films.
KeywordsThermal Diffusivity Diamond Film Mirage Effect Single Crystal Diamond Thin Diamond Film
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