Ion Energy Distribution at the Substrate in an ECR-Reactor
Electron cyclotron resonance (ECR) excited plasmas are especially useful for processes requiring low pressure and low gas temperature, and for the deposition of insulating layers [1,2]. In our case the ECR plasma is generated by coupling a circularly polarized microwave (2.45 GHz) into the reaction chamber. Resonance with the electrons gyrating in the overlaying magnetic field at 87.5 mT leads to an acceleration of the electrons, which in turn ionize the processing gas.
KeywordsElectron Cyclotron Resonance Coil Current Magnetic Field Configuration Resonance Zone High Energy Peak
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