Control of Texture and Defect Structure for Hot-Filament-Assisted CVD Diamond Films

  • R. E. Clausing
  • L. Heatherly
  • E. D. Specht
Part of the NATO ASI Series book series (NSSB, volume 266)


The morphology of diamond films grown by activated chemical vapor deposition, (CVD), varies greatly depending on the deposition conditions [1–6]. Small changes in the deposition conditions can cause major changes in the film morphology and crystal perfection. Areas a few millimeters apart in a film may be quite different unless considerable care is taken to ensure uniform deposition conditions. Because the properties of diamond films are strongly dependent upon the crystallite size, orientation, and perfection, it is important to understand the way in which growth conditions affect the film structure in order to design and optimize films for specific applications.


Scanning Electron Microscopy Observation Diamond Film Polycrystalline Film Chemical Vapor Deposition Diamond Individual Crystallite 
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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • R. E. Clausing
    • 1
  • L. Heatherly
    • 1
  • E. D. Specht
    • 1
  1. 1.Metals and Ceramics DivisionOak Ridge National LaboratoryOak RidgeUSA

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