Control of Texture and Defect Structure for Hot-Filament-Assisted CVD Diamond Films
The morphology of diamond films grown by activated chemical vapor deposition, (CVD), varies greatly depending on the deposition conditions [1–6]. Small changes in the deposition conditions can cause major changes in the film morphology and crystal perfection. Areas a few millimeters apart in a film may be quite different unless considerable care is taken to ensure uniform deposition conditions. Because the properties of diamond films are strongly dependent upon the crystallite size, orientation, and perfection, it is important to understand the way in which growth conditions affect the film structure in order to design and optimize films for specific applications.
KeywordsScanning Electron Microscopy Observation Diamond Film Polycrystalline Film Chemical Vapor Deposition Diamond Individual Crystallite
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- 1.B.V. Spitsyn et al.., Prog. Crystal Growth and Charact.17, 79 (198C).Google Scholar
- 3.K. Kobashi et al, Phys. Rev. B, 38, 4067 (1988).Google Scholar
- 7.Ch. Wild, N. Herres, J. Wagner, P. Koidl, and T. R. Anthony, Electrochem Soc. Proc. 89–12, 283 (1989).Google Scholar
- 8.Ch. Wild, N. Herres, and, P. Koidl, J. Appl. Phys. (Aug, xx (1990).Google Scholar
- 10.R.E. Clausing, L. Heatherly,and Jr., E. D. Specht, and K. L. More, to be published in the Proceedings of 2nd International Conference on the New Diamond Science and Technology, Washington, DC, September 24, 1990.Google Scholar
- 11.A. Vander Drift, Philips Res. Rep. 22, 267 (1967).Google Scholar