Abstract
Diamond films are typically produced by both plasma and thermally assisted CVD using methane as the carbon source in an excess of hydrogens. Although these films have been characterized using a wide variety of techniques, nuclear magnetic resonance (NMR) spectroscopy can yield valuable new information. Both hydrogen and carbon-13 NMR spectroscopy can be used to examine polycrystalline diamond films2, even those with a hydrogen content of < 1%. NMR, however, has not been used extensively to date.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
R.C. DeVries, Ann. Rev. Mater. Sci. 17161 (1987) and references therein
K.M. McNamara, K.K. Gleason and M.W. Geis, MRS Symposium Proceedings, 162(1989). In press
A. Abragam, “The Principles of Nuclear Magnetism” ( Oxford, New York, 1983 )
P.M. Hendricks, M.L. Cofield, R.H. Young, and J. M
Hewitt, J. Magn. Res. 58, 85 (1984)
S. Kaplan, F. Jansen, and M. Machonkin, Appl. Phys. Lett. 47, 750 (1985)
M.A. Petrich, K.A. Gleason, J.A. Reimer, Phys. Rev. B, 6 (18), 9722 (1987)
Y. Hirose and Y. Terasawa, Jap. J. Appl. Phys. 25, L519 (1982)
A. Hirayama, T. Ito, and K. Ito, Paper presented at Diamond Technology Initiative Symposium, SDIO/ISTONR, Crystal City, VA, 12–14 July 1988
J.H. van Vleck, Phys. Rev. 74, 1168 (1948)
A.G. Gaydon and H.G. Wolfhard, “Flames” (Chapman and
Hall, London, 1979)
R. E. Ferguson, J. Chem. Phys. 23, 2085 (1955)
R. E. Ferguson, Combustion and Flame, 1, 431 (1957)
C.J. Chu, R.H. Hauge, M.P. D’Evelyn, and J.L. Margrave, MRS Symposium Proceedings, 162(1989). In press
S. J. Harris, J. Appl. Phys. 65 (8), 3044 (1989)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1991 Plenum Press, New York
About this chapter
Cite this chapter
McNamara, K.M., Gleason, K.K. (1991). Carbon Bonding Environments in CVD Diamond Films Investigated via Solid-State NMR. In: Clausing, R.E., Horton, L.L., Angus, J.C., Koidl, P. (eds) Diamond and Diamond-like Films and Coatings. NATO ASI Series, vol 266. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5967-8_34
Download citation
DOI: https://doi.org/10.1007/978-1-4684-5967-8_34
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-5969-2
Online ISBN: 978-1-4684-5967-8
eBook Packages: Springer Book Archive