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Carbon Bonding Environments in CVD Diamond Films Investigated via Solid-State NMR

  • Karen Mary McNamara
  • Karen K. Gleason
Part of the NATO ASI Series book series (NSSB, volume 266)

Abstract

Diamond films are typically produced by both plasma and thermally assisted CVD using methane as the carbon source in an excess of hydrogens. Although these films have been characterized using a wide variety of techniques, nuclear magnetic resonance (NMR) spectroscopy can yield valuable new information. Both hydrogen and carbon-13 NMR spectroscopy can be used to examine polycrystalline diamond films2, even those with a hydrogen content of < 1%. NMR, however, has not been used extensively to date.

Keywords

Nuclear Magnetic Resonance Nuclear Magnetic Resonance Spectrum Carbonyl Carbon Diamond Film Boudouard Reaction 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • Karen Mary McNamara
    • 1
  • Karen K. Gleason
    • 1
  1. 1.Department of Chemical EngineeringMassachusetts Institute of TechnologyCambridgeUSA

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