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Carbon Bonding Environments in CVD Diamond Films Investigated via Solid-State NMR

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Diamond and Diamond-like Films and Coatings

Part of the book series: NATO ASI Series ((NSSB,volume 266))

Abstract

Diamond films are typically produced by both plasma and thermally assisted CVD using methane as the carbon source in an excess of hydrogens. Although these films have been characterized using a wide variety of techniques, nuclear magnetic resonance (NMR) spectroscopy can yield valuable new information. Both hydrogen and carbon-13 NMR spectroscopy can be used to examine polycrystalline diamond films2, even those with a hydrogen content of < 1%. NMR, however, has not been used extensively to date.

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References

  1. R.C. DeVries, Ann. Rev. Mater. Sci. 17161 (1987) and references therein

    Google Scholar 

  2. K.M. McNamara, K.K. Gleason and M.W. Geis, MRS Symposium Proceedings, 162(1989). In press

    Google Scholar 

  3. A. Abragam, “The Principles of Nuclear Magnetism” ( Oxford, New York, 1983 )

    Google Scholar 

  4. P.M. Hendricks, M.L. Cofield, R.H. Young, and J. M

    Google Scholar 

  5. Hewitt, J. Magn. Res. 58, 85 (1984)

    Google Scholar 

  6. S. Kaplan, F. Jansen, and M. Machonkin, Appl. Phys. Lett. 47, 750 (1985)

    Article  ADS  Google Scholar 

  7. M.A. Petrich, K.A. Gleason, J.A. Reimer, Phys. Rev. B, 6 (18), 9722 (1987)

    Article  ADS  Google Scholar 

  8. Y. Hirose and Y. Terasawa, Jap. J. Appl. Phys. 25, L519 (1982)

    Article  Google Scholar 

  9. A. Hirayama, T. Ito, and K. Ito, Paper presented at Diamond Technology Initiative Symposium, SDIO/ISTONR, Crystal City, VA, 12–14 July 1988

    Google Scholar 

  10. J.H. van Vleck, Phys. Rev. 74, 1168 (1948)

    Article  ADS  MATH  Google Scholar 

  11. A.G. Gaydon and H.G. Wolfhard, “Flames” (Chapman and

    Google Scholar 

  12. Hall, London, 1979)

    Google Scholar 

  13. R. E. Ferguson, J. Chem. Phys. 23, 2085 (1955)

    Article  ADS  Google Scholar 

  14. R. E. Ferguson, Combustion and Flame, 1, 431 (1957)

    Article  Google Scholar 

  15. C.J. Chu, R.H. Hauge, M.P. D’Evelyn, and J.L. Margrave, MRS Symposium Proceedings, 162(1989). In press

    Google Scholar 

  16. S. J. Harris, J. Appl. Phys. 65 (8), 3044 (1989)

    Article  ADS  Google Scholar 

Download references

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© 1991 Plenum Press, New York

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McNamara, K.M., Gleason, K.K. (1991). Carbon Bonding Environments in CVD Diamond Films Investigated via Solid-State NMR. In: Clausing, R.E., Horton, L.L., Angus, J.C., Koidl, P. (eds) Diamond and Diamond-like Films and Coatings. NATO ASI Series, vol 266. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5967-8_34

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  • DOI: https://doi.org/10.1007/978-1-4684-5967-8_34

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4684-5969-2

  • Online ISBN: 978-1-4684-5967-8

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