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Theory and Models for Nucleation and Growth of Diamond Films

  • Michael Frenklach
Part of the NATO ASI Series book series (NSSB, volume 266)

Abstract

Chemical vapor deposition (CVD) of diamond films at low pressures has been rapidly advanced in recent years.1–3 It has been demonstrated that high-quality diamond films can be produced employing different experimental techniques and using different hydrocarbons as starting material. The deposition rates and film quality have been repeatedly shown to be sufficiently high for a number of commercial applications to be feasible. At the same time, it becomes evident that further technological advancement, particularly in such challenging areas as single-crystal growth for electronic applications and low-temperature deposition for coating of optic and plastic materials, requires detailed understanding of the fundamental phenomena responsible for diamond nucleation and growth.

Keywords

Diamond Film Material Research Society Deposition Zone Electrochemical Society Diamond Surface 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    J. C. Angus and C. C. Hayman, Science 241: 913 (1988).ADSCrossRefGoogle Scholar
  2. 2.
    K. E. Spear, J. Am. Ceram. Sci. 72: 171 (1989).CrossRefGoogle Scholar
  3. 3.
    Diamond and Diamond-Like Films,J. P. Dismukes, ed., The Electrochemical Society, Pennington, NJ (1989).Google Scholar
  4. 4.
    B. V. Deryagin and D. V. Fedoseev, Russ. Chem. Rev. 39: 783 (1970).ADSCrossRefGoogle Scholar
  5. 5.
    B. V. Derjaguin and D. V. Fedoseev, Sci. Am. 233: 102 (1975).Google Scholar
  6. 6.
    B. V. Deryagin and D. V. Fedoseev, Growth of Diamond and Graphite from the Gas Phase, Nauka, Moscow (1977); (English translation in Diamond Growth and Films, edited by UCFMG, Elsevier, New York, 1989 ).Google Scholar
  7. 7.
    B. V. Spitsyn, L. L. Bouilov, and B. V. Derjaguin, J. Crystal Growth 52: 219 (1981).ADSCrossRefGoogle Scholar
  8. 8.
    D. V. Fedoseev, B. V. Deryagin, I. G. Varshayskaya, and A. S. Semenova-TyanShanskaya, Crystallization of Diamond, Nauka, Moscow (1984); (Engl. translation in Diamond Growth and Films, edited by UCFMG, Elsevier, New York, 1989 ).Google Scholar
  9. 9.
    D. V. Fedoseev, V. P. Varnin, and B. V. Deryagin, Russ. Chem. Rev. 53: 435 (1984).ADSCrossRefGoogle Scholar
  10. 10.
    B. V. Spitsyn, L. L. Bouilov, B. V. Derjaguin, Prog. Crystal Growth and Charact. 17: 79 (1988).Google Scholar
  11. 11.
    V. P. Varnin, D. V. Fedoseev, and I. G. Teremetskaya, Arch. Nauki Mater. 7: 121 (1986).Google Scholar
  12. 12.
    B. V. Deryagin, L. L. Bouilov, and B. V. Spitsyn, Arch. Nauki Mater. 7: 111 (1986).Google Scholar
  13. 13.
    D. V. Fedoseev and B. V. Derjaguin, Arch. Nauki Mater. 7: 213 (1986).Google Scholar
  14. 14.
    E. S. Machlin, J. Mater. Res. 3: 958 (1988).Google Scholar
  15. 15.
    M. Sommer, K. Mui, and F. W. Smith, Solid State Communications 69: 775 (1989).ADSCrossRefGoogle Scholar
  16. 16.
    J. E. Butler and F. C. Celii, in Diamond and Diamond-Like Films, J. P. Dismukes, ed., The Electrochemical Society, Pennington, NJ (1989), p. 317.Google Scholar
  17. 17.
    W. Piekarczyk, R. Roy, and R. Messier, J. Crystal Growth 98: 765 (1989).ADSCrossRefGoogle Scholar
  18. 18.
    L. E. Kline, W. D. Partlow, and W. E. Bies, in Proceedings of the Sixth Symposium on Plasma Processing, G. S. Mathad, G. C. Schwartz, and R. A. Gottscho, eds., Electrochemical Society, Pennington, NJ (1987), Vol. 87–8; also J. Appl. Phys. 65: 70 (1989).Google Scholar
  19. 19.
    S. J. Harris, A. M. Weiner, and T. A. Perry, Appl. Phys. Lett. 53: 1605 (1988).ADSCrossRefGoogle Scholar
  20. 20.
    M. Frenklach, J. Appl. Phys. 65: 5142 (1989).ADSCrossRefGoogle Scholar
  21. 21.
    G. Janssen, W. J. P. van Enckevort, and L. J. Giling, in Diamond and Diamond-Like Films, J. P. Dismukes, ed., The Electrochemical Society, Pennington, NJ (1989), p. 508.Google Scholar
  22. 22.
    B. V. Spitsyn and L. L. Bouilov, in Extended Abstracts. Diamond and Diamond-Like Materials Synthesis, G. H. Johnson, A. R. Badzian, and M. W. Geis, eds., Materials Research Society, Pittsburgh, PA (1988), p. 3.Google Scholar
  23. 23.
    D. V. Fedoseev, K. S. Uspenskaya, V. P. Varnin, and S. P. Vnukov, Bull. Acad. Sci. USSR Div. Chem. Sci. 27: 1088 (1978).CrossRefGoogle Scholar
  24. 24.
    W. Zhu, R. Messier, and A. R. Badzian, in Diamond and Diamond-Like Films, J. P. Dismukes, ed., The Electrochemical Society, Pennington, NJ (1989), p. 61.Google Scholar
  25. 25.
    T. McKenna, “Diamond Film Deposition and Microwave Plasma Processes in the C-H-O System,” M.S. Thesis, The Pennsylvania State University, 1990.Google Scholar
  26. 26.
    K. M. Tomaswick and J. N. Bruggeman, in Technology Update on Diamond Films, R. P. H. Chang, D. Nelson, and A. Hiraki, eds., Materials Research Society, Pittsburgh, PA (1989), p. 83.Google Scholar
  27. 27.
    M. Tsuda, M. Nakajima, M., and S. Oikawa, S., J. Am. Chem. Soc. 108: 5780 (1986).Google Scholar
  28. 28.
    M. Tsuda, M. Nakajima, M., and S. Oikawa, S., Jpn. J. Appl. Phys. 26: L527 (1987).Google Scholar
  29. 29.
    D. W. Brenner, Presented at the Workshop on the Science and Technology of Diamond Thin Films, Concord, Ohio, May 1990.Google Scholar
  30. 30.
    M. R. Pederson, K. A. Jackson, and W. E. Pickett, Presented at the Workshop on the Science and Technology of Diamond Thin Films, Concord, Ohio, May 1990.Google Scholar
  31. 31.
    S. P. Mehangru and A. B. Anderson, Presented at the Workshop on the Science and Technology of Diamond Thin Films, Concord, Ohio, May 1990.Google Scholar
  32. 32.
    M. Frenklach and K. E. Spear, J. Mater. Res. 3: 133 (1988).ADSCrossRefGoogle Scholar
  33. 33.
    F. G. Celii, P. E. Pehrsson, H.-t. Wang, and J. E. Butler, AppL Phys. Lett. 52: 2043 (1988).ADSCrossRefGoogle Scholar
  34. 34.
    D. Huang, M. Frenklach, and M. Maroncelli, J. Phys. Chem. 92: 6379 (1988).CrossRefGoogle Scholar
  35. 35.
    D. Huang and M. Frenklach, J. Phys. Chem.,submitted.Google Scholar
  36. 36.
    S. Matsumoto and Y. Matsui, J. Mater. Sci. 18: 1785 (1983).ADSCrossRefGoogle Scholar
  37. 37.
    J. C. Angus, F. A. Buck, M. Sunkara, T. F. Groth, C. C. Hayman, and R. Gat, Mater. Res. Soc. Bull. 14: 38 (1989).Google Scholar
  38. 38.
    D. G. Goodwin and G. G. Gavillet, J. Appl. Phys.,submitted.Google Scholar
  39. 39.
    Y. Matsui and M. Sahara, Jpn. J. Appl. Phys. 28: 1003 (1989).ADSCrossRefGoogle Scholar
  40. 40.
    Y. Mitsuda, Y. Kojima, T. Yoshida, and K. Akashi, J. Mater. Sci. 22: 1557 (1987).ADSCrossRefGoogle Scholar
  41. 41.
    M. A. Cappelli and P. H. Paul, J. Appl. Phys. 67: 2596 (1990).ADSCrossRefGoogle Scholar
  42. 42.
    Y. Matsui, A. Yuuki, M. Sahara, and Y. Hirose, Jpn. J. Appl. Phys. 28: 1718 (1989).ADSCrossRefGoogle Scholar
  43. 43.
    K. M. McNamara, K. K. Gleason, and M. W. Geis, in Diamond, Boron Nitride, Silicon Carbide and Related Wide Bandgap Semiconductors, J. T. Glass, R. F. Messier, and N. Fujimori, eds., Materials Research Society, Pittsburgh, PA (1990), in press.Google Scholar
  44. 44.
    C. J. Chu, B. J. Bai, M. P. D’Evelyn, R. H. Hauge, and J. L. Margrave, in Diamond, Boron Nitride, Silicon Carbide and Related Wide Bandgap Semiconductors, J. T. Glass, R. F. Messier,and N. Fujimori, eds., Materials Research Society, Pittsburgh, PA (1990), in press.Google Scholar
  45. 45.
    C. J. Chu, M. P. D’Evelyn, R. H. Hauge, and J. L. Margrave, J. Mater. Res.,in press.Google Scholar
  46. 46.
    S. J. Harris and L. R. Martin, J. Mater. Res.,in press.Google Scholar
  47. 47.
    L. R. Martin and M. W. Hill, Appl. Phys. Lett. 55: 2248 (1989).ADSCrossRefGoogle Scholar
  48. 48.
    K. E. Spear and M. Frenklach, in Diamond and Diamond-Like Films, J. P. Dismukes, ed., The Electrochemical Society, Pennington, NJ (1989), p. 122.Google Scholar
  49. 49.
    S. J. Harris, Appl. Phys. Lett. 56: 2298 (1990).Google Scholar
  50. 50.
    J. C. Angus, in Diamond and Diamond-Like Films, J. P. Dismukes, ed., The Electrochemical Society, Pennington, NJ (1989), p. 1.Google Scholar
  51. 51.
    T. Kawato and K. Kondo, Jpn. J. Appl. Phys. 26: 1429 (1987).ADSCrossRefGoogle Scholar
  52. 52.
    C.-P. Chang, D. L. Flamm, D. E. Ibbotson, and J. A. Mucha, J. Appl. Phys. 63: 1744 (1989).ADSCrossRefGoogle Scholar
  53. 53.
    S. Matsumoto, in Diamond and Diamond-Like Films, J. P. Dismukes, ed., The Electrochemical Society, Pennington, NJ (1989), p. 50.Google Scholar
  54. 54.
    Y. Hirose, S. Amanuma, N. Okaba, and K. Komaki, in Diamond and Diamond-Like Films, J. P. Dismukes, ed., The Electrochemical Society, Pennington, NJ (1989), p. 80.Google Scholar
  55. 55.
    Y. Liou, R. Weimer, D. Knight, and R. Messier, Appl. Phys. Lett. 56: 437 (1990).ADSCrossRefGoogle Scholar
  56. 56.
    W. A. Carrington, L. M. Hanssen, K. A. Snail, D. B. Oakes, and J. E. Butler, Metal. Trans. A 20: 1282 (1989).CrossRefGoogle Scholar
  57. 57.
    Y. Tzeng, C. Cutshaw, R. Phillips, T. Srivinyunon, A. Ibrahim, and B. H. Loo, Appl. Phys. Lett. 56: 134 (1990).ADSCrossRefGoogle Scholar
  58. 58.
    S. J. Harris and A. M. Weiner, Appl. Phys. Lett 55: 2179 (1989).ADSCrossRefGoogle Scholar
  59. 59.
    J. A. Mucha, D. L. Flamm, and D. E. Ibbotson, J. Appl. Phys. 65: 3448 (1989).ADSCrossRefGoogle Scholar
  60. 60.
    M. Frenklach and H. Wang, in Diamond Technology Initiative Symposium,Strategic Defence Initiative Organization Office of Innovative Science and Technology - Office of Naval Research, Crystal City, Virginia, July 1989, paper T10.Google Scholar
  61. 61.
    See,Combustion Chemistry, W. C. Gardiner, Jr., ed., Springer-Verlag, New York (1984); C. K. Westbrook and F. L. Dryer, Prog. Energy Combust. Sci. 10: 1 (1984); J. A. Barnard and J. N. Bradley, Flame and Combustion,Chapman and Hall, London (1985); I. Glassman, Combustion,Academic Press, Orlando, FL (1987); and recent volumes of Symposium (International) on Combustion,The Combustion Institute, Pittsburgh, PA.Google Scholar
  62. 62.
    See, J. I. Steinfeld, J. S. Francisco, and W. L. Hase, Chemical Kinetics and Dynamics, Pentice Hall, Englewood Cliffs, NJ (1989).Google Scholar
  63. 63.
    J. H. Kiefer and W. A. von Drasek, Int J. Chem. Kinet 22: 747 (1990).CrossRefGoogle Scholar
  64. 64.
    R. E. Duff and S. H. Bauer, J. Chem. Phys. 36: 1754 (1962).ADSCrossRefGoogle Scholar
  65. 65.
    H. V. Boenig, Plasma Science and Technology,Cornell U.P., Ithaca, NY (1982), Chap. 4.Google Scholar
  66. 66.
    N. G. Adams and D. Smith, inReactions of Small Transient Species, A. Fontijn and M. A. A. Clyne, eds., Academic Press, London (1983), Chap. 6.Google Scholar
  67. 67.
    M. Frenkach, D. Clary, W. C. Gardiner, Jr. and S. E. Stein, in Twentieth Symposium (International) on Combustion, The Combustion Institute, Pittsburgh, PA (1985), p. 887.Google Scholar
  68. 68.
    M. Frenklach, D. W. Clary, T. Yuan, W. C. Gardiner, Jr., and S. E. Stein, Combust. Sci. Technol. 50: 79 (1986).Google Scholar
  69. 69.
    M. Frenkach and J. Warnatz, Combust. Sci. Technol. 51: 265 (1986).CrossRefGoogle Scholar
  70. 70.
    M. Frenklach, D. Clary, W. C. Gardiner, Jr. and S. E. Stein, in Twenty-First Symposium (International) on Combuistion, The Combustion Institute, Pittsburgh, PA (1988), p. 1067.Google Scholar
  71. 71.
    M. Frenklach, in Twenty-Second Symposium (International) on Combustion, The Combustion Institute, Pittsburgh, PA (1989), p. 1075.Google Scholar
  72. 72.
    M. Frenklach and E. D. Feigelson, Astrophys. J. 341: 372 (1989).ADSCrossRefGoogle Scholar
  73. 73.
    M. Frenklach, M., in Carbon in the Galaxy: Studies from Earth and Space,J. Tarter, ed., NASA CP, in press.Google Scholar
  74. 74.
    M. Weissman and S. W. Benson, Int. J. Chem. Kinet. 16: 307 (1984).CrossRefGoogle Scholar
  75. 75.
    J. A. Cole, J. D. Bittner, J. B. Howard, and J. P. Longwell, Combust. Flame 56: 51 (1984).CrossRefGoogle Scholar
  76. 76.
    M. Frenkach and H. Wang, in Twenty-Third Symposium (International) on Combustion,The Combustion Institute, Pittsburgh, PA, in press.Google Scholar
  77. 77.
    S. J. Harris, A. M. Weiner, and R. J. Blint, Combust Flame 72: 91 (1988).CrossRefGoogle Scholar
  78. 78.
    B. S. Haynes and H. Gg. Wagner, Prog. Energy combust Sci. 7: 229 (1981).Google Scholar
  79. 79.
    W. C. Roman and M. B. Colket, III, in Diamond and Diamond-Like Films, J. P. Dismukes, ed., The Electrochemical Society, Pennington, NJ (1989), p. 330.Google Scholar
  80. 80.
    S. J. Harris, J. Appl. Phys. 65: 3044 (1989).ADSCrossRefGoogle Scholar
  81. 81.
    S. J. Harris and A. M. Weiner, J. Appl. Phys. 67: 6520 (1990).ADSCrossRefGoogle Scholar
  82. 82.
    M. Frenklach and H. Wang, Phys. Rev. B,submitted.Google Scholar
  83. 83.
    R. J. Kee, J. F. Grgar, M. D. Smooke, and J. A. Miller, Report No. SAND85-8240, Sandia, Livermore, CA (December 1985).Google Scholar

Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • Michael Frenklach
    • 1
  1. 1.Department of Materials Science and EngineeringThe Pennsylvania State UniversityUniversity ParkUSA

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