Abstract
Thin films deposited by nonequilibrium processes, such as in low pressure plasmas, are sensitive to aging due to the presence of free radicals, dangling bonds, defects, voids, internal stress and other features. Generally, several aspects of film stability or aging can be considered:
-
A:
spontaneous aging — internal material property characterized by the driving force to acquire minimum system energy without any intermediate agent;
-
B:
environmental aging — reaction with the ambient atmosphere (not “deliberately severe”);
-
C:
accelerated aging — post deposition treatment (deliberately severe) using various thermal, chemical, radiative, mechanical and other agents.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
J.C. Angus, P. Koidl, S. Domitz, Carbon thin films, in: “Plasma Deposited Thin Films”, J. Mort, F. Jansen, eds., CRC Press, Boca Raton (1986).
H. Biederman, L. Martinu, Plasma polymer-metal composite films, in: “Plasma Deposition, Treatment and Etching of Polymers”, R. d’Agostino, ed., Academic Press, New York (1990).
J.M.E. Harper, J.J. Cuomo, R.J. Gambino and H.R. Kaufman, in: “Ion Bombardment Modification of Surfaces: Fundamentals and Applica-cations”, O. Auciello, R. Kelly, eds., Elsevier, Amsterdam (1984).
P. Koidl, Ch. Wild, B. Dischler, J. Wagner, M. Ramsteiner, in: “Amorphous Hydrogenated Carbon”, J.J. Pouch, S.A. Alterovitz, eds., Mater Sci. Forum, Vol. 52/53: 41 (1990).
L. Martinu, Amorphous carbon films, in: “High Energy Density Technologies in Materials Science”, F. Garbassi, E. Occhiello, eds., Kluwer Academic Publ., Dordrecht (1990).
C. Wild, P. Koidl, J. Wagner, Plasma deposition of a-C:H films: the role of process gas, plasma chemistry and plasma surface interactions, in: “Amorphous Hydrogenated Carbon Films”, P. Koidl, P. Oelhafen, eds., Proc. E-MRS, Vol. 17, Les Editions de Physique, Paris (1987).
J.C. Angus, F. Jansen, Dense “diamondlike” hydrocarbons as random covalent networks, J. Vac. Sci. Technol. A 6: 1778 (1988).
H. Yasuda, “Plasma Polymerization”, Academic Press, New York (1985).
A.M. Wrobel, Aging process in plasma-polymerized organosilicon thin films, J. Macromol. Sci.-Chem. A22: 1089 (1985).
L. Martinu, H. Biederman, J. Nedbal, Dielectric properties of fluoro-and chlorofluorocarbon films plasma polymerized in an RF glow discharge, Thin Solid Films 136: 11 (1986).
J. Perrin, R.L. Siemens, E. Kay, Thermal transitions and dielectric relaxations in plasma-polymerized polytetrafluoroethylene, IBM Res. Rep. RJ 4792 (1985).
B. Dischler, Bonding and hydrogen incorporation in a-C:H studied by infrared spectroscopy, p. 189 in ref. 6.
C. Wild, P. Koidl, Network structure and thermal decomposition of plasma deposited a-C:H films studied by gas effusion spectroscopy, p. 207 in ref. 6.
S. Orzeszko, Bhola N. De, J.A. Woollam, J.J. Pouch, S.A. Alterovitz, D.C. Ingram, Thin film hermeticity: A quantitative analysis of diamondlike carbon using variable spectroscopic eliipsometry, J. Appl. Phvs. 64: 4175 (1988).
C.J. Robinson, R.N. Payne, A.E. Bell, Hydrogenated amorphous carbon dielectric coatings for magneto-optic data storage media, J. Appl. Phys. 64: 4646 (1988).
H. Biederman, L. Martinu, S. Nespurek, Aging effects in composite plasma polymer/metal films, in: Proc. 8th Int. Symp. Plasma Chem. (ISPC-8), K. Akashi, A. Kinbara, eds., Tokyo (1987), p. 1364.
L. Martinu, Optical response of composite plasma polymer/metal films in effective medium approach, Solar Energy Mater. 15: 21 (1987).
R. dAgostino, L. Martinu, V. Pische, Effect of bias and temperature on the bulk and surface properties of gold containing plasma polymerized fluorocarbons, Plasma Chem. Plasma Process., in press.
L. Martinu, V. Pische, R. dAgostino, Surface Modification by plasma deposition of metal-filled polymers, in: Metallisation in Polymers, E. Sacher, J.J. Pireaux, S. Kowalczyk, eds., ACS Symp. Ser. 440, (1990), in press.
E. Kay, Ion and laser interactions as encountered in synthesis and utilisation of metal-containing polymers, Proc. E-MRS, Vol. 15, p. 355, Les Editions de Physique, Paris (1987).
D.I. Jones, A.D. Stewart, Properties of hydrogenated amorphous carbon films and the effects of doping, Phil. Mag. B 46: 423 (1982).
R.E. Sah, B. Dischler, A. Bubenzer, P. Koidl, Amorphous carbon coatings prepared by high rate rf plasma deposition of fluorinated benzenes, Appl. Phys. Lett. 46: 739 (1985).
H. Biederman, L. Martinu, J. Zemek, Carbon and composite carbon metal films deposited from an rf discharge operated in organic gases, Vacuum 35: 447 (1985).
C.P. Klages, R. Memming, Microstructure in physical properties of metal-containing hydrogenated carbon films, p. 609 in ref. 4.
C. Weissmantel, E. Ackerman, K. Bewilogna, G. Hecht, K. Kupfer, B. Rau, Structure property relationships of carbonaceous films grown under ion enhancement, J. Vac. Sci. Technol. A 4: 2892 (1986).
H. Biederman, K. Kahoutek, Z. Chmel, V. Stary, R.P. Howson, Hard carbon and composite metal/hard carbon films prepared by a dc unbalanced planar magnetron, Vacuum 40: 251 (1990).
N. Savvides, Diamondlike films and properties, p. 408 in ref. 4.
M.R. Wertheimer, M. Moisan, Comparison of microwave and lower frequency plasmas for thin film deposition and etching, J. Vac. Sci. Technol. A 3: 2643 (1985).
R. Claude, M. Moisan, M.R. Wertheimer, Z. Zakrzewski, Comparison of microwave and lower frequency discharges for plasma polymeriza- tion, Plasma Chem. Plasma Process. 7: 451 (1987).
L. Martinu, J.E. Klemberg-Sapieha, M.R. Wertheimer, Dual-mode microwave/radio frequency plasma deposition of dielectric thin films, Appl. Phys. Lett. 54, 2645 (1989).
J.E. Klemberg-Sapieha, O.M. Küttel, L. Martinu, M.R. Wertheimer, Dual microwave/radio frequency plasma deposition of functional coatings, Thin Solid Films, (1990) in press.
O.M. Küttel, J.E. Klemberg-Sapieha, L. Martinu, M.R. Wertheimer, Energy fluxes in mixed microwave radio frequency plasma, Thin Solid Films 193, (1990), in press.
O.M. Küttel, L. Martinu, D. Poitras, J.E. Klemberg-Sapieha, M.R. Wertheimer, Diamond-like carbon films deposited in dual microwave/radio frequency plasma, Proc. E-MRS Meeting, Strasbourg, November 1990, submitted.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1991 Plenum Press, New York
About this chapter
Cite this chapter
Martinu, L. (1991). Aging Processes in Diamond-Like Carbon and Carbon/Metal Films. In: Clausing, R.E., Horton, L.L., Angus, J.C., Koidl, P. (eds) Diamond and Diamond-like Films and Coatings. NATO ASI Series, vol 266. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5967-8_29
Download citation
DOI: https://doi.org/10.1007/978-1-4684-5967-8_29
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-5969-2
Online ISBN: 978-1-4684-5967-8
eBook Packages: Springer Book Archive