Post Deposition Treatments and Stability of Diamond-Like Films

  • R. Kalish
Part of the NATO ASI Series book series (NSSB, volume 266)


The effects that energy deposition by ions, electrons and photons have on the structure and properties of Diamond-Like Carbon (amorphous hydrogenated carbon) films are reviewed. In all cases the treated films turn electrically conductive and optically opaque; nevertheless it is shown that different physical processes are responsible for the observed changes for the different modes of energy deposition. Results obtained by a variety of experimental techniques which probe the structural and compositional changes are described. Models which fit the experimental data on hydrogen loss and on changes in electrical and optical properties as a result of ion irradiation are proposed.


Electron Irradiation Hydrogen Release Collision Cascade Hydrogen Loss Projectile Trajectory 
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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • R. Kalish
    • 1
  1. 1.Solid State Institute and Physics DepartmentTechnion-Israel Institute of TechnologyHaifaIsrael

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