Characterization of the Composition, Electronic Structure and Hardness of Carbon Films Obtained by Ion Implantation, Laser Ablation, and Dual Ion Beam Sputtering

  • M. Allouard
  • J. C. Pivin
Part of the NATO ASI Series book series (NSSB, volume 266)


Diamond-like films were grown by C+ ion beam implantation at low energies (0.1 to 2.0 keV) on various substrates (Si, SiC, metals). The film properties were compared to those of films prepared either by dual ion beam sputtering (DIBS) of an a-C target and the substrate, magnetron sputtering or laser ablation.


Laser Ablation Amorphous Semiconductor Tauc Plot Implantation Energy Nuclear Reaction Analysis 
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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • M. Allouard
    • 1
  • J. C. Pivin
    • 1
  1. 1.C.S.N.S.M.France

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