The Effect of Deposition Conditions on the Optical and Tribological Properties of Annealed Diamond-Like Carbon Films

  • A. Grill
  • V. Patel
  • B. S. Meyerson
Part of the NATO ASI Series book series (NSSB, volume 266)


Diamond-like carbon, or DLC films, are metastable amorphous materials, containing a mixture of sp2, sp3 and even sp1 coordinated carbon atoms in a disordered network. Since first deposited by Aisenberg and Chabot in 1971 1, DLC films have been prepared by a variety of methods including DC or RF plasma assisted CVD, sputtering, or ion beam deposition, from a variety of carbon bearing, solid or gaseous source materials 2–5.


Friction Coefficient Hydrogen Content Increase Annealing Temperature Substrate Bias Dynamic Friction Coefficient 
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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • A. Grill
    • 1
  • V. Patel
    • 1
  • B. S. Meyerson
    • 1
  1. 1.T.J.Watson Research CenterIBM Research DivisionYorktown HeightsUSA

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