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Conductivity in Amorphous Carbon and Amorphous Hydrogenated Carbon Films

  • D. Das Gupta
  • F. Demichelis
  • A. Tagliaferro
Part of the NATO ASI Series book series (NSSB, volume 266)

Abstract

There has been a considerable recent interest in amorphous carbon (a-C) and amorphous hydrogenated carbon (a-C:H) films. These films present a combination of a number of useful properties such as a high value of hardness, transparency to visible radiation over a wide wavelength range and high corrosion resistance. Carbon atoms in these materials have both threefold (sp2) and fourfold (sp3) coordination, and the physical properties are determined by the proportion and distribution of sp2 and sp3 sites1. It is known, for example, that in evaporated a-C sp2 sites are essentially uniformly distributed within the material, whereas in a-C:H these sp2 sites form “islands” which are embedded in a matrix consisting essentially of sp3 sites.

Keywords

Fermi Level Amorphous Carbon Band Tail Hydrogen Flow Rate Wide Wavelength Range 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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    D. Dasgupta, F. Demichelis, R. Spagnolo and A. Tagliaferro, MRS Proceedings 188, W. Oliver, M. Doerner, G. Pharr and F.R. Brotzen (eds.), In press (1990)Google Scholar
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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • D. Das Gupta
    • 1
  • F. Demichelis
    • 1
  • A. Tagliaferro
    • 1
  1. 1.Dip. FisicaPolitecnico TorinoTorinoItaly

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