From Amorphous Carbon to Amphorous Diamond-Like Carbon
Among the various carbon and hydrocarbon PVD coatings, only a few may be called diamond-like carbon (DLC) films. Angus proposed a classification based on the density and hydrogen content of the coatings determining their diamond-like character1. The high density is related to the large fraction of tetrahedral chemical bonds (diamond sp3 hybridization) observed in DLC and the correlatively reduced amount of trigonal bonds (graphite sp2 hybridization). The hydrogen content directly parallels the increase of the average coordination number.
KeywordsAverage Coordination Number Elastic Recoil Detection Analysis Diamondlike Carbon Film Film Contamination Trigonal Bond
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