Production of Carbon Cluster Beams and Their Characterisation by Time-of-Flight Mass Spectroscopy

  • H.-G. Busmann
  • H. Gaber
  • T. Müller
  • I. V. Hertel
Part of the NATO ASI Series book series (NSSB, volume 266)


Carbon clusters are of considerable interest because of their chemical and physical properties/1/, their occurrence e.g. in combustion flames/2/ and in laser ablation of solid carbon materials/e.g. 3-7/. Also, carbon clusters are discussed as being nuclei in CVD—diamond film growth and for their potential in a—C:H film growth by ion cluster beam deposition (ICBD). ICBD /8,9/ is an interesting alternative to established methods for thin film technology and has found applications e.g./9/ in silicon and compound semiconductor technology, opto—eléctronics and optical films. It has been suggested/10/ that ICBD is special in that cluster fragmentation at the surface occurs and the fragments move on the surface without penetration into or destruction of the surface, but they do have enough energy for chemical reactions.


Stagnation Pressure Carbon Cluster Pure Carbon Cluster Beam Neutral Cluster 
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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • H.-G. Busmann
    • 1
  • H. Gaber
    • 1
  • T. Müller
    • 1
  • I. V. Hertel
    • 1
  1. 1.Freiburger-Material-Forschungszentrum (F-M-F) and Fakultät für PhysikAlbert-Ludwigs-UniversitätFreiburgGermany

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