Abstract
Amorphous hydrogenated carbon films are known to be extremely hard, wear-resistant and chemically inert1. In general, they are electrically insulating. Meyerson and Smith2,3 and Jones and Stewart4 showed that a-C:H can be made conductive by addition of the “classical” doping agents, i.e. PH3, B2H6, and N2. It has been discussed4,5,6 whether the term “doping” can be used with this materials like with crystalline semiconductors.
Keywords
- Contact Resistance
- Amorphous Carbon Film
- Constant Current Source
- Crystalline Semiconductor
- Temperature Dependent Electrical Conductivity
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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© 1991 Plenum Press, New York
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Rohwer, K. et al. (1991). Preparation and Characterization of Doped a-C:H Films. In: Clausing, R.E., Horton, L.L., Angus, J.C., Koidl, P. (eds) Diamond and Diamond-like Films and Coatings. NATO ASI Series, vol 266. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5967-8_14
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DOI: https://doi.org/10.1007/978-1-4684-5967-8_14
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