Preparation and Characterization of Doped a-C:H Films
Amorphous hydrogenated carbon films are known to be extremely hard, wear-resistant and chemically inert1. In general, they are electrically insulating. Meyerson and Smith2,3 and Jones and Stewart4 showed that a-C:H can be made conductive by addition of the “classical” doping agents, i.e. PH3, B2H6, and N2. It has been discussed4,5,6 whether the term “doping” can be used with this materials like with crystalline semiconductors.
KeywordsContact Resistance Amorphous Carbon Film Constant Current Source Crystalline Semiconductor Temperature Dependent Electrical Conductivity
Unable to display preview. Download preview PDF.
- 1.C.P. Klages and R. Memming, “Microstructure and Physical Properties of Metal-containing Hydrogenated Carbon Films” in: “Amorphous Hydrogenated Carbon”, J.J. Pouch, S.A. Alterovitz, eds., TransTech Publications (1989)Google Scholar
- 4.D.I. Jones and Stewart, “Properties of hydrogenated amorphous carbon films and the effects of doping”, Philos. Mag. B 46: 423 (1982)Google Scholar
- 7.H. Köberle, “Struktur und elektrische Leitfähigkeit von HF-Plasma-erzeugten metallhaltigen Kohlenwasserstoffschichten”, PhD Thesis, University of Hamburg (1989)Google Scholar
- 9.A.L. Efros and B.I. Shklovskii, “Coulomb gap and low temperature conductivity of disordered systems”, J. Phys. C: Sol. State Phys. 8: L49 (1975); A.L. Efros, “Coulomb gap in disorderd systems”, J. Phys. C: Sol. State Phys. 9: 2021 (1976)Google Scholar