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Preparation Techniques for Diamond-Like Carbon

  • Yves Catherine
Part of the NATO ASI Series book series (NSSB, volume 266)

Abstract

There have recently been many publications reporting efforts to produce carbon thin films with diamond-like properties. It appears to be possible to make mechanically hard, high resistivity (>1012 Ωcm) semitransparent carbon films by a variety of ion beam and plasma techniques. This kind of films can be deposited by low-energy carbon ion beam1–3 or by dual beam4 and ion plating techniques,5 by RF sputtering6,7 or RF and DC plasma decomposition of a hydrocarbon gas or other alkanes.8–10

Keywords

Thin Solid Film Carbon Film Electron Cyclotron Resonance Amorphous Carbon Film High Frequency Discharge 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • Yves Catherine
    • 1
  1. 1.Laboratoire des Plasmas et des Couches Minces - UMR 110Institut de Physique et Chimie des Materiaux 2 rue de la HoussiniereNantes Cedex 03France

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