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Importance of Surface Chemistry/Catalysis in the Processing of Semiconductors

  • J. Enrique Ortega
  • Rodolfo Miranda
Part of the NATO ASI Series book series (NSSB, volume 265)

Abstract

Thin layers of alkali metals deposited on a GaAs(110) surface can enhance by-several orders of magnitude the oxidation kinetics of the substrate. Pure alkali oxides of different stoichiometry have been grown at 150 K on the GaAs(110) substrate, which does not react with the alkali oxides at this temperature. The spectral features of these different alkali oxides have been used to identify the oxygen species responsible for the Negative Electron Affinity activation of a Cs/O/GaAs photocathode, as well as the reaction products of the alkali-promoted oxidation of the GaAs(110) surface.

Keywords

Alkali Metal Work Function Scan Tunneling Microscopy Photoemission Spectrum Alkali Metal Atom 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • J. Enrique Ortega
    • 1
  • Rodolfo Miranda
    • 1
  1. 1.Departmento de Física de la Materia CondensadaUniversidad Autónoma de MadridMadridSpain

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