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Secondary Ion Mass Spectrometry — Fundamentals and Application to Heterogeneous Catalysis

  • N. M. Reed
  • J. C. Vickerman
Part of the NATO ASI Series book series (NSSB, volume 265)

Abstract

Secondary ion mass spectrometry, SIMS, is the mass spectrometry of atomic or molecular particles which are emitted (a process known as sputtering) when a surface, usually a solid although it may be a liquid, is bombarded by energetic primary particles. The primary particles may be electrons, ions, neutrals or photons. The secondary ions which are detected may be emitted from the surface in the ionised state or they may be initially emitted as neutrals to be post-ionised before analysis.

Keywords

Atom Beam Ionisation Probability Single Crystal Surface Plasma Desorption Mass Spectrometry Primary Beam Current 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1991

Authors and Affiliations

  • N. M. Reed
    • 1
  • J. C. Vickerman
    • 1
  1. 1.Centre for Surface and Materials Analysis, Department of ChemistryUniversity of Manchester Institute of Science and TechnologyManchesterUK

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