Abstract
Scanning acoustic microscopy (SAM) employs mechanical scanning in both x and y directions. There is one great advantage in this configuration which is that imaging is done on axis, resulting in diffraction limited resolution. However a mechanical system is inherently slow and cumbersome, even though recent advances have brought the scanning time for an image at high frequencies down to the order of a second. For the inspection of inexpensive items such as integrated circuit chips, which is done at frequencies below 100 MHz, it is imperative to have a cheap and ideally real time system. The present work describes recent developments in our laboratory in this direction.
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© 1990 Springer Science+Business Media New York
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Cheeke, J.D.N., Germain, L. (1990). Electronic Scanning in Acoustic Microscopy. In: Thompson, D.O., Chimenti, D.E. (eds) Review of Progress in Quantitative Nondestructive Evaluation. Review of Progress in Quantitative Nondestructive Evaluation. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5772-8_68
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DOI: https://doi.org/10.1007/978-1-4684-5772-8_68
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