Electronic Scanning in Acoustic Microscopy

  • J. D. N. Cheeke
  • L. Germain
Part of the Review of Progress in Quantitative Nondestructive Evaluation book series


Scanning acoustic microscopy (SAM) employs mechanical scanning in both x and y directions. There is one great advantage in this configuration which is that imaging is done on axis, resulting in diffraction limited resolution. However a mechanical system is inherently slow and cumbersome, even though recent advances have brought the scanning time for an image at high frequencies down to the order of a second. For the inspection of inexpensive items such as integrated circuit chips, which is done at frequencies below 100 MHz, it is imperative to have a cheap and ideally real time system. The present work describes recent developments in our laboratory in this direction.


Insertion Loss Lithium Niobate Wedge Angle Cylindrical Lens Frequency Scanning 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  • J. D. N. Cheeke
    • 1
  • L. Germain
    • 1
  1. 1.Département de physiqueUniversité de SherbrookeSherbrookeCanada

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