Temperature Measurement of Silicon Wafers Using Photoacoustic Techniques
Semiconductor processing temperatures are currently measured using either pyrometers or thermocouples, both of which have significant limitations. Temperature measurements based on the temperature dependance of the Lamb wave velocities in silicon and longitudinal waves through the ambient directly above the wafer are explored.
KeywordsAcoustic Wave Silicon Wafer Probe Beam Lamb Wave Nitrogen Laser
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