Dry-Etching Damage in Nano-Structures
In the past few years a great deal of new physics has emerged from the examination of structures made in semi-conducting materials with dimensions on a nano-metric scale -some examples are the observation of Aranhov-Bohm oscillations in a ring, the quantised resistance observed with point contacts and in wires with restrictions and the continuing saga of the photoluminescence from quantum dots and the allied hope of more efficient laser performance.
KeywordsIdeality Factor Gallium Arsenide Indium Phosphide Schottky Junction Silicon Tetrachloride
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