Structure and Properties of Point Defects in Semiconductors

  • L. C. Kimerling
Part of the NATO ASI Series book series (NSSB, volume 202)


Junction spectroscopic methods utilize voltage modulation of the depletion width of a semiconductor junction to isolate and detect electronic transitions at defect states which are positioned in the band gap. Measurement structures may employ p-n junctions, Schottky-barriers or metal-insulator semiconductor junctions. The key feature of the approach is the separation of the carrier capture and emission processes by control of the Fermi level with junction bias. The semiconductor junction provides an ideal sample system for the control of defect charge state, the measurement of defect density, and the observation of the spectrum of defect state energies. The primary limitation of this approach is that it provides no chemical signature. The energy position and capture cross sections of a defect state yield no direct aid in identification.


Charge State Schottky Barrier Stress Coupling Defect State Capture Cross Section 
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Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • L. C. Kimerling
    • 1
  1. 1.AT&T Bell LaboratoriesMurray HillUSA

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