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Preparation of High Temperature Superconductor Thin Films on Si Based Substrates by Excimer Laser Ablation, Film-Substrate Interactions, and Plasma Processing Effects on Crystallinity

  • R. A. Neifeld
  • A. Hansen
  • R. Pfeffer
  • E. Potenziani
  • W. Wilbur
  • D. Basarab
  • R. Lareau
  • J. Shappirio
  • C. Wrenn
  • L. Calderon
  • W. Savin
  • A. Tauber
  • G. Liang
  • S. Gunapala
  • M. Croft
  • J. Price
  • D. Simons
  • W. T. HillIII
  • B. Turner
  • A. Pinkas
  • J. Zhu
  • D. Ginley

Abstract

Thin films were prepared by excimer laser ablation from Y-Ba-Cu-O and Tl-Ba-Ca-Cu-O targets. The films were prepared upon amorphous quartz and crystalline Si (111) substrates in partial pressures of oxygen. The substrate-film interaction, crystallization, composition, and microstructure of these films verst_s the deposition condition variables were studied including, substrate temperature, oxygen partial pressure, laser fluence and repetition rate. Additional deposition variables include the substrate/substrate holder and plasma generation loop DC and RE bias conditions and the target which can be DC biased. With the various biasing/plasma conditions we have studied to date, we have been unable to lower the substrate deposition temperature required for crystallization of Y-Ba-Cu-O films by more than 50 degrees C. Films of Y-Ba-Cu-O produced upon Si (111) are shown to be superconducting.

Keywords

Substrate Temperature Laser Ablation Laser Fluence Substrate Holder Laser Repetition Rate 
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Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • R. A. Neifeld
    • 1
  • A. Hansen
    • 1
  • R. Pfeffer
    • 2
  • E. Potenziani
    • 2
  • W. Wilbur
    • 2
  • D. Basarab
    • 2
  • R. Lareau
    • 2
  • J. Shappirio
    • 2
  • C. Wrenn
    • 3
  • L. Calderon
    • 3
  • W. Savin
    • 4
  • A. Tauber
    • 5
  • G. Liang
    • 6
  • S. Gunapala
    • 6
  • M. Croft
    • 6
  • J. Price
    • 7
  • D. Simons
    • 8
  • W. T. HillIII
    • 9
  • B. Turner
    • 9
  • A. Pinkas
    • 9
  • J. Zhu
    • 9
  • D. Ginley
    • 10
  1. 1.Harry Diamond LaboratoriesAdelphiUSA
  2. 2.Electronic Technologies and Devices LaboratoryFort MonmouthUSA
  3. 3.Vitronics Corp.EatontownUSA
  4. 4.NJITNewarkUSA
  5. 5.SCEEEUSA
  6. 6.Department of Physics and AstronomyRutgers UniversityPiscatawayUSA
  7. 7.US Navy — Naval Surface Warfare CenterSilver SpringUSA
  8. 8.Catholic UniversityUSA
  9. 9.Institute for Physical Science and TechnologyUniversity of MarylandCollege ParkUSA
  10. 10.Sandia National LaboratoriesAlbuquerqueUSA

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