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Processing and Patterning Techniques for Thin Films of YBa2Cu3O7

  • C. M. Mombourquette
  • J. G. Beery
  • D. R. Brown
  • R. A. Lemons
  • I. D. Raistrick

Abstract

Superconducting thin films of YBa2Cu3O7 were prepared by co-evaporation of copper, yttrium, an barium fluoride onto single-crystal strontium titanate substrates. E-beam evaporation was used for the yttrium and copper, and thermal evaporation was used for the BaF2. The as-deposited films were converted to the superconducting oxides by a post-evaporation anneal in dry and wet oxygen. We discuss here the patterning and processing of the films into a current constriction device geometry.

Keywords

Rutherford Backscatter Spectrometry Strontium Titanate Rutherford Backscatter Spectrometry Spectrum Barium Fluoride Oxide Patterning 
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References

  1. 1.
    I. D. Raistrick et al., "YBa2Cu3O7 Thin Films Prepared by Evaporation from Y, Cu, and BaF2," these proceedings.Google Scholar
  2. 2.
    J. A. Martin, M. Nastasi, J. R. Tesmer, and C. J. Maggiore, "High-Energy Elastic Backscattering of Helium Ions for Compositional Analysis of High-Temperature Superconductor Thin Films," App. Phys. Lett. 52 (25), 2177 – 2179 (1988).ADSCrossRefGoogle Scholar

Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • C. M. Mombourquette
    • 1
  • J. G. Beery
    • 1
  • D. R. Brown
    • 1
  • R. A. Lemons
    • 1
  • I. D. Raistrick
    • 1
  1. 1.Electronics Research GroupLos Alamos National LaboratoryLos AlamosUSA

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