Processing and Patterning Techniques for Thin Films of YBa2Cu3O7
Superconducting thin films of YBa2Cu3O7 were prepared by co-evaporation of copper, yttrium, an barium fluoride onto single-crystal strontium titanate substrates. E-beam evaporation was used for the yttrium and copper, and thermal evaporation was used for the BaF2. The as-deposited films were converted to the superconducting oxides by a post-evaporation anneal in dry and wet oxygen. We discuss here the patterning and processing of the films into a current constriction device geometry.
KeywordsRutherford Backscatter Spectrometry Strontium Titanate Rutherford Backscatter Spectrometry Spectrum Barium Fluoride Oxide Patterning
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- 1.I. D. Raistrick et al., "YBa2Cu3O7 Thin Films Prepared by Evaporation from Y, Cu, and BaF2," these proceedings.Google Scholar