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Coevaporated Bi-Sr-Ca-Cu Oxide Films and Their Patterning Film Fabrication of Artificial (BiO)/(SrCaCuO) Layered Structure

  • T. S. Kalkur
  • R. Y. Kwor
  • S. Jernigan
  • R. Smith

Abstract

Initially, after the discovery of high Tc superconducting materials, most of the studies were confined to yttrium based 1-2-3 compounds. However, Bi and Tl based compounds are attracting the attention of many investigators recently because of their relatively lower sensitivity to oxygen and easy annealing1. In addition to a semiconducting phase2, these compounds have multiple superconducting phases with transition temperatures between 85 and 110 K. Various approaches to obtaining high T, superconducting BiCaSrCu oxide films have been reported. These include electron beam coevaporation3, ion and reactive ion beam deposition4–5, multisource magnetron sputtering6, spin—on coating7 and laser ablation8. For applications in electronics, another important aspect is the patterning of thin superconducting films. Numerous papers have been published regarding the patterning of yttrium based 1-2-3 films by wet chemical etching9, ion beam etching10 and laser ablation11, but there are only a few papers on the patterning of Bi based compounds. In this paper we report the results of the fabrication of BiSrCaCu oxide superconducting thin films by coevaporation of CaF2, SrF2, Bi and Cu followed by a post—deposition annealing in wet oxygen; and their patterning by wet chemical etching.

Keywords

Oxide Film Etching Rate Zirconia Substrate Strontium Bismuth Tungsten Boat 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    H. Maeda, Y. Tanaka, M. Fukutomi, and T. Asano, “A new high T, oxide superconductor without a rare earth element”, Japan J. Appl. Phys. 27, L 209 (1988).ADSCrossRefGoogle Scholar
  2. 2.
    T. Satoh, T. Yoshitake, Y. Kubo, and H. Igarashi, “Composition dependence of superconducting properties in Bi2(Sri-xCax)r,+1 Cur1Oy(n=2,3) thin films, Appl. Phys. Lett. 53, 1213 (1988).Google Scholar
  3. 3.
    C.E. Rice, A.F. Levi, R.M. Fleming, P. Marsh, K.W. Baldwin, M. Anzlower, A.E. White, K.T. Short, S. Nakahara, and H.L. Stromer, “Preparation of superconducting thin films of calcium strontium bismuth copper oxides by coevaporation”, Appl. Phys. Lett. 52, 1828 (1988).ADSCrossRefGoogle Scholar
  4. 4.
    R.D. Lorentz and J.H. Sexton, “Oriented high temperature Bi—Sr—Ca—Cu oxide thin films prepared by ion—deposition”, Appl. Phys. Lett., 53, 1654 (1988).ADSCrossRefGoogle Scholar
  5. 5.
    A.B. Harker, P.H. Kobrin, P.E.D.Morgan, J.F. DeNatale, J.J. Ratto, I.S. Gergis, and D.G. Howitt, “Reactive ion deposition of thin films in the bismuth — calcium — strontium — copper oxide ceramic superconductor system”, Appl. Phys. Lett., 52, 2186, (1988).ADSGoogle Scholar
  6. 6.
    B.T. Sullivan, N.R. Osborne, W.H. Hardy, J.F. Cardon, B.X. Yang, P.J. Michael and R.R. Parsons, “Bi—Sr—Ca—Cu—O superconducting thin films deposited by dc magnetron sputtering”, Appl. Phys. Lett., 52, 1992, (1988).Google Scholar
  7. 7.
    S.L. Furcone and Y.M. Chiang, “Spin—on Bi4 Sri Ca3 Cu4 O16+x superconducting thin films from citrate precursors”, Appl. Phys. Lett., 52, 2180 (1988).ADSCrossRefGoogle Scholar
  8. 8.
    M.K. Jaggi, M. Meskoob, and S.F. Wahid and C.J. Rollins. Rollins, “Superconductivity in thin films of Bi—Sr—Ca—Cu oxide deposited via laser ablation of oxide pellets”, Appl. Phys. Lett., 53, 1551 (1988).Google Scholar
  9. 9.
    I.Shih and C.X. Qui, “Chemical etching of Y—Ba—Cu—O thin films”, Appl. Phys. Lett., 52, 1523 (1988).ADSCrossRefGoogle Scholar
  10. 10.
    J.W.C. de Vries, B. Dam, M.G.J. Heijman, G.M. Stollman, and M.A.M. Gijis, C.W. Hagen and R.P. Griessen, Appl. Phys. Lett., 52, 1904, (1988).Google Scholar
  11. 11.
    J. Mannhart, M. Scheuermann, C.C. Tsui, M.M. Oprysko, C.C. Chi, C.D. Umbach, R.H. Koch and C. Melton, “Micropatterning of high T” films with an excimer laser“, 52, 1271 (1988).Google Scholar
  12. 12.
    C.J.D. Hetherington, R. Ramesh, M.A. O’Keefe, R. Kilas and G. Thomas, S.M. Green and H.L. Luo, “High resolution electron microscopy of the C = 30.5 A and C = 38.2 A polytypoids in the Bi—Ca—Sr—Cu—O superconductor”, Appl. Phys. Lett., 53, 12, (1988).Google Scholar

Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • T. S. Kalkur
    • 1
  • R. Y. Kwor
    • 1
  • S. Jernigan
    • 1
  • R. Smith
    • 2
  1. 1.Dept. of Electrical and Computer EngineeringUniversity of Colorado at Colorado SpringsColorado SpringsUSA
  2. 2.Kaman Sciences CorporationColorado SpringsUSA

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