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Non-Aqueous One-Micron Feature Size Lithography of Superconducting Films

  • R. Boerstler
  • C. Carey
  • A. Poirier
  • Y. Huang
  • J. Ryu
  • C. Vittoria

Abstract

Conventional lithography was used to pattern Y Ba2 Cu3 O6+x thin films. The effort is focused on application of equipment and materials commonly used in industrial microelectronic facilities. Techniques for fabricating medium scale integrated superconducting circuits with minimum feature sizes of one micron have been successfully developed under this program. Attention has been turned toward building devices (SQUID) and microstrip structures to evaluate the effect of film properties on device performance. Test patterns currently used to guide process development consist of a one micron weak link SQUID and coplanar microwave resonators.

Keywords

Methyl Isobutyl Ketone Direct Writing Superconducting Film Minimum Feature Size Thin Film Superconductor 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    H. Yamada, U. Kawabe, DC Squid with High-Critical-Temperature Oxide-Superconductor Film, Jap. Jour. of App. Phys. 26: L1925 (1987)ADSCrossRefGoogle Scholar
  2. 2.
    M. Tonouchi, Y. Sakaguchi, T. Kobayshi, Chemical Etching of High-Tc Superconducting Films in Felcox-115 solution, Jap. Jour. of App. Phys. 27: L98 (1988)ADSCrossRefGoogle Scholar
  3. 3.
    N.P. Bangal, A.L. Sandkuhl, Chemical Durability of High-Temperature Super-conductor YBa 2Cu306-x in Aqueous Environment, App. Phys. lett. 52: 323 (1988)Google Scholar
  4. 4.
    M.F. Yan, R.L. Barns, H.M. O’Bryan, Jr., P.K. Galligher, R.C. Sherwood, S. Jin, Water Interaction with the Superconducting YBa2Cu307, App. Phys. lett. 51: 532 (1987)Google Scholar
  5. 5.
    J. Mannhart, M. Scheverman, C.C. Tsuei, M.M.Oprysko, C.C. Chir, C.P. Umbaeh, R.H. Koch, C.M.ller, Micropatterning of High Tc Films with and Excimer laser, App. Phys. Lett. A 46: 331 (1988)Google Scholar
  6. 6.
    G. Liberts, M. Eyett, D. Bauerle, Direct Laser Writing of Superconducting Patterns into Semiconducting Ceramic Y-Ba-Cu-O, App. Phys. Lett. A. 46: 331 (1988)Google Scholar
  7. 7.
    H.C. Pandey, Y.K Jain, S.K. Bhatnagar, B.R. Singh, W.S. Khokle, Direct Laser Beam Writing on Y-Ba-Cu-O Film for Superconducting Microelectri Devices, Jap. Jour. App. Phys. 27: L1517 (1988)ADSGoogle Scholar
  8. 8.
    S. Matsui, Y. Ochai, Y. Kojima, H. Tsuge, N. Tsuge, N. Takado, K. Asakawa, H. Matsuteva, J. Fujita, T. Yoshitake, Y. Kubo, Focused Ion Beam Processes for High Tc Superconductors, J. Vac. Sci. Technical, B6: 900, (1988)CrossRefGoogle Scholar
  9. 9.
    A. Enokihara, H. Higashino, K. Setsune, T. Mitsuyu, K. Wasa, Super- conductivity in a 2 micron Wide Strip line of Gd-Ba-Cu-O Thin Film Fabricated by Low Temperature Process, Jap. Jour. App. Phys. 27: L1521 (1988)ADSGoogle Scholar
  10. 10.
    G.C. Hilton, E.B. Harris, D.J. Van Harlingen, Growth, Patterning, and Weak-link Fabrication of Superconducting YBa2 Cu3 06-X Thin Films, Appl. Phys. lett. 53: 1107 (1988)Google Scholar

Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • R. Boerstler
    • 1
  • C. Carey
    • 1
  • A. Poirier
    • 1
  • Y. Huang
    • 2
  • J. Ryu
    • 2
  • C. Vittoria
    • 2
  1. 1.Sanders AssociatesA Lockheed CompanyNashuaUSA
  2. 2.Center for Electromagnetics ResearchNortheastern UniversityBostonUSA

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