Composition Analysis of High Tc Bi-Sr-Ca-Cu-O Thin Films by RBS and EPMA
Precise knowledge of the variation of the composition is necessary for deposition of thin films over large areas. Preparation of multi-component thin films from single source has been important for many technological applications. This is especially true for the development of high-TC, perovskite-oxide superconducting phases which may be formed with three or more metallic elements in a stoichiometric proportion deposited on a multi-component substrate1–5. Variation of film thickness usually shows a bell-or ‘M’-shaped profile with respect to the axis of a circular, ring type or cylindrical target (Fig. 1). The concentration of individual elements deposited from a multi-component source may vary radially over substrate areas. Moreover, the deposition rates of the constituents may also vary over the duration of the deposition. It is, therefore, necessary to employ techniques which will measure accurately the variation of composition over the substrate area as well as over the film thickness.
KeywordsEPMA Analysis EPMA Result EPMA Measurement Cylindrical Target Solar Energy Research Institute
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