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Characterization of ZrO2 Buffer Layers for Sequentially Evaporated Y-Ba-Cu-O on Si and Al2O3 Substrates

  • George J. Valco
  • Norman J. Rohrer
  • John J. Pouch
  • Joseph D. Warner
  • Kul B. Bhasin

Abstract

A large variety of techniques have been employed for the formation of thin films of the high temperature superconducting oxides on many different substrates. These efforts have been driven by the desire to investigate and develop electronic applications of these materials. Several of the substrates that have been used possess undesirable electronic properties, such as the large dielectric constant of SrTiO3. For many applications it is desirable to obtain the superconducting films on silicon or, for high frequency applications, on substrates such as Al2O3 or GaAs. Unfortunately, the deleterious interactions between the films and these substrates or common dielectrics1, such as silicon dioxide, result in unacceptable degradation of both the superconductor and the substrate. This has led to the investigation of the use of thin films of materials such as ZrO2 2 or silver3 as buffer layers between the superconductor and the substrate.

Keywords

Buffer Layer Auger Electron Spectroscopy Sapphire Substrate High Frequency Application Sputter Time 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    M. Gurvitch and A. T. Fiory, Preparation and Substrate Reactions of Superconducting Y-Ba-Cu-O Films, Appl. Phys. Lett. 51, 1027 (1987).Google Scholar
  2. 2.
    A. Mogro-Campero and L. G. Turner, Thin Films of Y-Ba-Cu-O on Silicon and Silicon Dioxide, Appl. Phys. Lett. 52, 1185 (1988).Google Scholar
  3. 3.
    K. Harada, N. Fujimori and S. Yazu, Y-Ba-Cu-O Thin Films on Si Sub- strate, Jpn. J. Appl. Phys. 27, L1524 (1988).ADSCrossRefGoogle Scholar
  4. 4.
    B-Y. Tsaur, M. S. Dilorio and A. J. Strauss, Preparation of Superconducting YBa2Cu3Ox Thin Films by Oxygen Annealing of Multilayer Metal Films, Appl. Phys. Lett. 51, 858 (1987).Google Scholar
  5. 5.
    C. X. Qiu and I. Shih, Y-Ba-Cu-O Thin Films Prepared by a Multilayer Vacuum Method, Appl. Phys. Lett. 52, 587 (1988).Google Scholar
  6. 6.
    C-A. Chang, C. C. Tsuei, C. C. Chi and T. R. McGuire, Thin Film YBaCuO Superconductors Formed by Cu/BaO/Y2O3 Layer Structures, Appl. Phys. Lett. 52, 72 (1988).Google Scholar
  7. 7.
    Z. L. Bao, F. R. Wang, Q. D. Jiang, S. Z. Wang, Z. Y. Ye, K. Wu, C. Y. Li and D. L. Yin, YBaCuO Superconducting Thin Films With Zero Resistance at 84K by Multilayer Deposition, Appl. Phys. Lett. 51, 946 (1987).Google Scholar
  8. 8.
    G. J. Valco, N. J. Rohrer, J. D. Warner and K. B. Bhasin, Sequentially Evaporated Thin Y-Ba-Cu-O Superconductor Films: Composition and Processing Effects, American Institute of Physics Conference Proceedings, to be published.Google Scholar
  9. 9.
    N. Hess, L. R. Tessler, U. Dai and G. Deutscher, Preparation and Patterning of YBaCuO Thin Films Obtained by Sequential Deposition of CuOx/Y2O3/BaF2, Appl. Phys. Lett. 53, 698 (1988).Google Scholar

Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • George J. Valco
    • 1
  • Norman J. Rohrer
    • 1
  • John J. Pouch
    • 2
  • Joseph D. Warner
    • 2
  • Kul B. Bhasin
    • 2
  1. 1.Department of Electrical EngineeringThe Ohio State UniversityColumbusUSA
  2. 2.National Aeronautics and Space AdministrationLewis Research CenterClevelandUSA

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