Metalorganic Chemical Vapor Deposition of Highly Textured Superconducting YBa2Cu3O7-x Films
C-axis textured single phase superconducting YBa2Cu3O7-x films have been successfully grown on the yttria-stabilized zirconia (100) substrates by using the metalorganic chemical vapor deposition technique. After the post annealing the films deposited on the yttria-stabilized zirconia substrates exhibited a highly textured x-ray pattern with c-axis perpendicular to the substrate surface. These films show an onset superconducting transition temperature of 93K with the resistance becoming zero at 84K. The films deposited on sapphire show a semiconducting feature in the normal state with a broad superconducting transition at much lower temperatures (10–40K). In order to gain some insight onto the growth process, we also studied the mass transport of metalorganic compounds as a function of source temperature, flow rate and reactor pressure.
KeywordsYttria Stabilize Zirconia Metalorganic Chemical Vapor Deposition Post Annealing Mass Transport Rate Fuse Quartz Substrate
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