Deposition of TlBaCaCuO Thin Films
For the high TC system of TlBaCaCuO1, it is specially interesting to investigate the formation of films from sputtered BaCaCuO2. In such experiments, a Tl-free target of BaCaCuO is used for the film deposition and therefore the contamination problem of the vacuum system can be avoided. Using such rf sputtered BaCaCuO films, it is necessary to carry out oxidation and Ti diffusion to form the final compound. In this paper, some of the experimental results on the deposition of BaCaCuO thin films are first described. Variation of composition in the BaCaCuO films with the heat treatment is then presented.
KeywordsHeat Treatment Electron Probe Micro Analyzer Apply Physic Letter Bright Area Segregation Effect
Unable to display preview. Download preview PDF.
- 3.M.W. Denhoff, P. Grant, C.X. Qiu, I. Shih, P.T. Robinson, I. Sproule and D. Mitchell, submitted to Applied Physics Letters.Google Scholar