Effect of Annealing Conditions on the Structural and Superconducting Properties of Y-Ba-Cu-O Films
The effect of various annealing treatments on ion beam sputter-deposited Y1Ba2CuyO7-x (y=3 and 5) amorphous thin films has been studied using scanning electron microscopy (SEM), x-ray diffraction and dc resistivity measurements. SEM analysis showed that the morphology of the films were clearly divided into three categories: an equiaxial grain structure, a well oriented grid-like microstructure and a textured platelet structure. The equiaxial grain structure (random orientation according to x-ray diffraction measurements) was obtained when the film was annealed at slow heating and cooling rates in an oxygen atmosphere. The grid-like microstructure (b/c-axes oriented normal to the plane) was obtained in Cu-rich composition (y=5) by rapid thermal annealing. A textured platelet microstructure (c-axis oriented normal to the plane) was obtained using slow heating rates and by carefully controlling the gas environment at the temperature region near the orthorhombic-tetragonal transition. Thus, we have demonstrated the ability to control the morphology and orientation of the film by varying the annealing process.
KeywordsRapid Thermal Annealing Amorphous Thin Film Slow Heat Rate Single Crystalline Film Room Temperature Resistance
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