Tl-Based Superconducting Films by Sputtering Using a Single Target
We have prepared superconducting Tl-Ba-Ca-Cu-O films on MgO(100) and SrTiO3(100) substrates by diode sputtering using a single composite oxide target. Films containing primarily T12Ba2Ca1Cu2O8 phase have a Tc(R=0) at 102K and a transport Jc of 104A/cm2 at 90K. For T12Ba2Ca2Cu3O10 films, Tc(R=0)’s are at 116K and transport Jc’s are as high as 105A/cm2 at 100K. Both types of films are strongly textured with the c-axis perpendicular to the film plane. The rocking curve of the T12Ba2Ca2Cu3O10 films is 0.22° wide. The film surfaces are porous as revealed by scanning electron microscopy (SEM) micrographs. Microstructures of the T12Ba2Ca2Cu3O10 films are studied by transmission electron microscopy (TEM).
KeywordsRutherford Backscattering Spectrometry Film Plane Gold Foil Rock Curve Transmission Electron Diffraction
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