Advertisement

Bi-Sr-Ca-Cu-O Compositional Modulation and Multilayered Film Synthesis by Plasma Controlled Sputtering

  • Hideomi Koinuma
  • Hirotoshi Nagata
  • Akihiro Takano
  • Masashi Kawasaki
  • Mamoru Yoshimoto

Abstract

Compositionally modulated Bi-Sr-Ca-Cu-O films were prepared by a method in which the target area to be sputtered can be controlled by varying the distribution of magnetic field over the target. When a binary target comprised of an inner Ca1.0Cu1.5Ox and an outer Bi1.6Sr1.0Oy disks was used, the deposited film composition could be varied successively from Bi-Sr rich to Ca-Cu rich by controlling the magnetic coil currents. Based on this result, films accumulating predominant (Bi-Sr-O) and (Ca-Cu-O) bilayers were deposited continuously on MgO(l00) substrates by periodical change of the coil currents. The film designed to have 100 repetitions of 10Å thick Bi-Sr rich and l0Å thick Ca-Cu rich layers has an actual periodicity of about 19Å by the analysis with low angle X-ray scattering. The films deposited at 200°C were almost insulating in the as-grown state, but they turned to be superconducting by the annealing at temperatures of 880–900°C in air. The annealed films have strong c-axis orientation normal to the substrate, resistivities of a few m Ω cm at room temperature, and zero resistivity temperatures higher than 70K.

Keywords

Multilayered Film Actual Periodicity Annealed Film Coil Current Homogeneous Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    H.Maeda, Y.Tanaka, M.Fukutomi, and T.Asano, “A New High-Tc Oxide Superconductor without a Rare Earth Element,” Jpn. J. Appl. Phys., 27: L209 (1988).ADSCrossRefGoogle Scholar
  2. 2.
    U.Endo, S.Koyama, and T.Kawai, “Preparation of the High-Tc Phase of Bi-Sr-Ca-Cu-O Superconductor,”Jpn. J. Appl. Phys., 27: L1476 (1988).ADSCrossRefGoogle Scholar
  3. 3.
    H.Nobumasa, K.Shimizu, Y.Kitano, and T.Kawai, “Formation of a 100K Superconducting Bi(Pb)-Sr-Ca-Cu-0 Film by a Spray Pyrolysis,” Jpn. J. Appl. Phys., 27: L1669 (1988).ADSCrossRefGoogle Scholar
  4. 4.
    T.Hata, Y.Kamide, S.Nakagawa, and K.Hattori, “Heat-resistance of hydrogenated amorphous silicon films prepared by compressed magnetic field-magnetron sputtering with He and Ar gases,” J. App]. Phys., 59: 3604 (1986).ADSCrossRefGoogle Scholar
  5. 5.
    H.Koinuma, H.Nagata, A.Takano, M.Kawasaki, and M.Yoshimoto, “Preparation of Compositionally Modulated Bi-Sr-Ca-Cu-O Multilayered Films by Plasma Controlled Sputtering,” to be published in Jpn. J. Appl. Phys., 27 (1988).Google Scholar
  6. 6.
    T.Kato, T.Dei, T.Kumagai, and S.Matsuda, “Superconducting Bi-Sr-CaCu-0 Thin Films by Sputtering,” Jpn. J. Appl. Phys., 27: L1097 (1988).ADSCrossRefGoogle Scholar
  7. 7.
    Brian T.Sullivan, N.R.Osborne, W.N.Hardy, J.F.Carolan, B.X.Yang, P.J.Michael, and R.R.Parsons, “Bi-Sr-Ca-Cu-oxide superconducting thin films deposited by dc magnetron sputtering,” Appl. Phys. Lett., 52: 1992 (1988).ADSCrossRefGoogle Scholar
  8. 8.
    H.Negata, A.Takano, M.Kawasaki, M.Yoshimoto, and H.Koinuma, “Preparation of Bi-Sr-Ca-Cu-O Thin Films by Sputtering under Variable Magnetic Field,” submitted to Communications of J. Amer. Cer. Soc.Google Scholar

Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • Hideomi Koinuma
    • 1
  • Hirotoshi Nagata
    • 2
  • Akihiro Takano
    • 1
  • Masashi Kawasaki
    • 3
  • Mamoru Yoshimoto
    • 1
  1. 1.The Research Laboratory of Engineering MaterialsTokyo Institute of TechnologyMidori-ku, Yokohama, KanagawaJapan
  2. 2.Central Research LaboratorySumitomo Cement Co. Ltd.Japan
  3. 3.Department of Industrial ChemistryFaculty of Engineering, University of TokyoJapan

Personalised recommendations