Magnetron Sputtering of Thin Films of Tl-Ca-Ba-Cu-O

  • P. Arendt
  • W. Bongianni
  • N. Elliott
  • R. Muenchausen


Superconducting thin films of the Tl-Ca-Ba-Cu-O system have been prepared by magnetron sputtering from a single compound target and post deposition annealing in an overpressure of Tl. The films are deposited on <100> MgO and <100> yttria stabilized zirconia (YSZ). The anneals were done at atmospheric pressure and the anneal protocols used result in both the 2122 and 2223 phases. The best films are grown on the YSZ substrates and have zero resistance at 107°K. RF surface resistance was measured as a function of the oxygen partial pressure during the post deposition anneals. The lowest surface resistance measurements were obtained for the 100% oxygen partial pressure anneals.


Oxygen Partial Pressure Yttria Stabilize Zirconia Surface Resistance Yttrium Iron Garnet Post Deposition Anneal 


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  1. 1.
    J. H. Kang, R. T. Kampwirth, and K. E. Gray, Phys. Lett. A, vol. 131, pp. 208–210 (1988).ADSCrossRefGoogle Scholar
  2. 2.
    D. S. Ginley, J. F. Kwak, R. P. Hellmer, R. J. Baughman, E. L. Venturini, and B. Morosin, Appl. Phys. Lett., vol. 53, pp. 406–408 (1988).ADSCrossRefGoogle Scholar
  3. 3.
    W. Y. Lee, V. Y. Lee, J. Salem, T. C. Huang, R. Savoy, D. C. Bullock, and S. S. P. Parkin, Appl. Phys. Lett., vol. 53, pp. 329–331 (1988).ADSCrossRefGoogle Scholar
  4. 4.
    I. Shih and C. X. Qiu, Appl. Phys. Lett., vol. 53, pp. 523–525 (1988).ADSCrossRefGoogle Scholar
  5. 5.
    Y. Ichikawa, H. Adachi, K. Setsune, S. Hatta, K. Hirochi, and K. Wasa, Appl. Phys. Lett., vol. 53 pp. 919–921 (1988).ADSCrossRefGoogle Scholar
  6. 6.
    D. S. Ginley, J. F. Kwak, R. P. Hellmer, R. J. Baughman, E. L. Venturini, M. A. Mitchell and B. Morosin, Submitted to Physica C.Google Scholar
  7. 7.
    J. L. Archer, W. L. Bongianni, and J. H. Collins, J. Appl. Phys., Vol. 41, No. 3, pp. 1359–1360, (1970).ADSCrossRefGoogle Scholar
  8. 8.
    A. Fathy, D. Kalokitis, and E. Belohoubek, Microwave Jour., Vol. 1, No. 10, pp. 75–94, Oct. (1988).ADSGoogle Scholar
  9. 9.
    J. A. Martin, M. Nastasi, J. R. Tesmer, and C. J. Maggiore, Submitted to Appl. Phys. Lett.Google Scholar
  10. 10.
    P. N. Arendt, N. E. Elliott, R. E. Muenchausen, M. Nastasi, and T. Archuleta, submitted to “1988 AVS Topical Conference on High Tc Superconductors”.Google Scholar
  11. 11.
    D. W. Face, J. T. Kucera, J. Crain, M. M. Matthiesen, D. Steel, G. Somer, J. Lewis, J. M. Grayheal, T. P. Orlando, and D. A. Rudman, to appear in IEEE Transactions on Magnetics, MAG-25 (1989).Google Scholar

Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • P. Arendt
    • 1
  • W. Bongianni
    • 1
  • N. Elliott
    • 1
  • R. Muenchausen
    • 1
  1. 1.Materials Science and Technology DivisionLos Alamos National LaboratoryLos AlamosUSA

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