Plasma-Assisted Laser Deposition of Superconducting Thin Films — A Basic Study

  • H. S. Kwok
  • J. P. Zheng
  • Z. Q. Huang
  • Q. Y. Ying
  • S. Witanachchi
  • D. T. Shaw


An experimental study of the process of plasma-assisted laser deposition was described. It was found that atomic beams of Y,Ba,Cu, and O were inportant for the in-situ growth of superconducting films. These atomic beams could be modelled very well by a supersonic expansion mechanism. The atomic kinetic energies and their spatial dependence were measured and correlated to the thin film properties.


Mach Number Laser Fluence Atomic Beam Epitaxial Film Superconducting Film 
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Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • H. S. Kwok
    • 1
  • J. P. Zheng
    • 1
  • Z. Q. Huang
    • 1
  • Q. Y. Ying
    • 1
  • S. Witanachchi
    • 1
  • D. T. Shaw
    • 1
  1. 1.Institute on SuperconductivityState University of New York at BuffaloBuffaloUSA

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