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Adatom Site Determination using Channeling Effects in RHEED on X-ray and Auger Electron Production

  • J. C. H. Spence
  • Y. Kim
Part of the NATO ASI Series book series (NSSB, volume 188)

Abstract

In recent years, several authors have discussed the effects of variations in diffraction conditions in Reflection High Energy Electron Diffraction (RHEED) on Auger electron or characteristic X-ray emission. Ichimiya and Takeuchi [1] in particular have recently observed a strong enhancement of the Auger electron production at the surface wave resonance (SWR) condition, in experiments on MgO under Ultra-high Vacuum (UHV) conditions. “Monolayer resonances” which increase the intensity of Bragg beams by as much as 100, have also been analyzed in Pt(111) by Marten and Meyer-Ehmsen [2]. A related theoretical and experimental study of Auger and backscattered electron production for low energy electrons (E < 2 kV) incident at near-normal incidence on bulk samples has also been given [3,4]. (Here many Bloch waves are excited, unlike the reflection case.) Experimental observations of channelling effects on backscattered electron production, and their uses to provide image contrast in a UHV scanning reflection electron microscope have also been reported [5]. For a recent analysis of the diffraction conditions required to excite the surface wave resonance condition, the reader is referred to the work of Ichimiya, Kambe and Lehumpfuhl [6]. Channeling effects on characteristic X-ray production in RHEED are further analyzed in Miyake and Hayakawa [7].

Keywords

Auger Electron Reflection High Energy Electron Diffraction Secondary Emission Diffraction Condition Reflection High Energy Electron Diffraction Pattern 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    A. Ichimiya and Takeuchi, Intensity anomalies of Auger electron signals observed by incident beam rocking method for magnesium oxide (001) surface, Surface Sci., 128:343 (1983).ADSCrossRefGoogle Scholar
  2. 2.
    A. Marten and G. Meyer-Ehmsen, Resonance effects in RHEED from Pt(111), Surface Sci., 151:570 (1985).ADSCrossRefGoogle Scholar
  3. 3.
    M. Baines and A. Howie, Crystalline effects in backscattering and Auger production, Surface Sci., 53:546 (1975).ADSCrossRefGoogle Scholar
  4. 4.
    S. K. Anderson and A. Howie, Diffraction effects in backscattering and Auger production near crystal surfaces, Surface Sci., 50:197 (1975).ADSCrossRefGoogle Scholar
  5. 5.
    G. Hembree and J. M. Cowley, Electron channeling and microdiffraction from crystal surfaces (p. 145), in.: “Scanning Electron Microscopy 1979”, O. Johari, ed., SEM Inc., AMF O’Hare, II. (1979).Google Scholar
  6. 6.
    A. Ichimiya, K. Kambe and G. Lehumpfuhl, Observation of the surface state resonance effect by the convergent beam RHEED technique, J. Phys. Soc. Jap., 49:684 (1980).ADSCrossRefGoogle Scholar
  7. 7.
    S. Miyake and K. Hayakawa, Resonance effects in low and high energy diffraction by crystals, Acta Cryst., A26:60 (1970).Google Scholar
  8. 8.
    J. M. Cowley, Surface energies and surface structure of small crystals studied by use of a STEM instrument, Surface Sci., 114:587 (1982).ADSCrossRefGoogle Scholar
  9. 9.
    L. M. Peng and J. M. Cowley, A geometric analysis of resonance conditions in RHEED, J. Electr. Micros. Technique, 6:43 (1987).CrossRefGoogle Scholar
  10. 10.
    D. Cherns, A. Howie and M. H. Jacobs, Characteristic X-ray production in thin crystals, Z. Naturforsch., A28:565 (1973).ADSGoogle Scholar
  11. 11.
    B. W. Batterman, Detection of foreign atom sites by their X-ray fluorescence scattering, Phys. Rev. Letts., 22:703 (1969).ADSCrossRefGoogle Scholar
  12. 12.
    R. Collela, n-Beam dynamical diffraction of high energy electrons at glancing incidence. Generally theory and computational methods, Acta Cryst., A28:ll (1972).Google Scholar
  13. 13.
    P. A. Bennett, B. N. Halawith and A, P. Johnson, Crystalline intermediate phases in the formation of epitaxial Si(111), J. Vac. Sci. Tech., in press (1987).Google Scholar
  14. 14.
    M. Ichikawa and K. Hayakawa, Micro-probe reflection high-energy electron diffraction and technique, Jap. J. Appl. Phys., 21:145 (1982).ADSCrossRefGoogle Scholar
  15. 15.
    C. J. Harland, P. Akhter and J. A. Venables, Accurate microcrystallography at high spatial resolution using electron backscattering patterns in a field emission gun scanning electron microscope, J. Phys. E. Sci. Instr., Vol 14:175 (1981).ADSCrossRefGoogle Scholar
  16. 16.
    H. A. Bethe, Theorie der Beugung von Elektronen on Kristalen, Ann. Phys. Lpz., 87:55 (1928).ADSCrossRefGoogle Scholar
  17. 17.
    S. Miyake, K. Hayakawa and R. Miida, Variation of emission yield of X-rays from crystals with diffraction condition of exciting electron, Acta Cryst., A24:182 (1968).Google Scholar
  18. 18.
    L. C. Feldman and J. W. Mayer, “Fundamentals of Surface and Thin Film Analysis”, North Holland, New York (1986).Google Scholar
  19. 19.
    L. M. Peng and J. M. Cowley, Dynamical diffraction calculations for RHEED and REM, Acta Cryst., A42:545 (1986).Google Scholar
  20. 20.
    Z. L. Wang, Personal communication (1987).Google Scholar
  21. 21.
    J. Tafto and J. C. H. Spence, Atomic site determination using the channeling effect in electron induced X-ray emission, Ultramicros., 9:243 (1982).CrossRefGoogle Scholar
  22. 22.
    J. C. H. Spence and J. Tafto, ALCHEMI: a new technique for locating atoms in small crystals, J. Micros., 130:147 (1983).CrossRefGoogle Scholar
  23. 23.
    A. Howie, Image contrast and localized signal selection techniques, J. Micros., 117:11 (1979).CrossRefGoogle Scholar
  24. 24.
    P. G. Self and P. R. Buseck, Low energy limit to channeling effects, Phil. Mag. Letts., A48:L21 (1983).ADSCrossRefGoogle Scholar
  25. 25.
    S. Pennycook, in: “Scanning Electron Microscopy 1987”, O. Johari, ed., AMF O’Hare, Chicago, in press (1987).Google Scholar
  26. 26.
    C. J. Rossouw and V. W. Maslen, Localization and ALCHEMI for zone axis orientations, Ultramicros., 21:277 (1987).CrossRefGoogle Scholar

Copyright information

© Plenum Press, New York 1988

Authors and Affiliations

  • J. C. H. Spence
    • 1
  • Y. Kim
    • 1
  1. 1.Department of PhysicsArizona State UniversityTempeUSA

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