Inelastic Scattering Effects in RHEED and Reflection Imaging
Although the very first work on the dynamical theory of electron diffraction (Bethe), dealt with RHEED geometry (the so-called Bragg case), progress in developing a completely satisfactory theory has been rather slow. Recent spectacular results e.g. REM images of surface structures, Osakabe et al[2,3], and RHEED oscillations in MBE, Neave et al, together with the increasing number of studies with clean surfaces, may however spur the theoreticians. In somewhat similar circumstances several decades ago, rapid advances took place in transmission electron diffraction (the Laue case) largely as a result of the enormous growth in transmission microscopy, Hirsch et al. Real space, diffraction contrast images and later, high resolution structure images, of both perfect and imperfect crystals can now be interpreted in enormous and quantitative detail almost as a matter or routine.
KeywordsInelastic Scattering Scanning Transmission Electron Microscope Bloch Wave Diffraction Contrast Slice Method
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