Calculation of Rheed Intensity from Growing Surfaces
Reflection high energy electron diffraction (RHEED) is one of the most powerful techniques for structural analysis of surfaces as described by Ino in these proceedings . Several structures have been analyzed such as cleaved MgO(001) [2,3] and hydrogen stabilized Si(001)-1 × 1 surface . In RHEED, the electron beam is incident on the surface at a very small angle. For this particular geometrical condition, the RHEED intensity is quite sensitive to the surface roughness like point defects and steps, which are often present on real surfaces.
KeywordsStep Edge Reflection High Energy Electron Diffraction Molecular Beam Epitaxy Growth Intensity Oscillation Order Beam
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