Temperature Dependence of the Surface Disorder on Ge(001) Due to Ar+ Ion Bombardment

  • A. J. Hoeven
  • J. S. C. Kools
  • J. Aarts
  • P. C. Zalm
Part of the NATO ASI Series book series (NSSB, volume 188)


Sputtering, i.e. ion-bombardment-induced erosion of solid surfaces, has been investigated for over a century. It is both of fundamental importance for the understanding of the interaction of swift particles with matter, as well as from a practical point of view. For example, in many UHV research set-ups a noble-gas ion sputter facility is an indispensable tool for surface cleaning. For this particular application there are two notable drawbacks, viz. recoil implantation or ion beam mixing of surface impurities into the topmost atomic layers of the target and creation of radiation damage. The former can be eliminated by prolonged bombardment, the latter which is foremost important with crystalline targets will be the subject of the present paper.


Auger Electron Spectroscopy Target Temperature Reflection High Energy Electron Diffraction Reflection High Energy Electron Diffraction Pattern Intermediate Temperature Regime 


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Copyright information

© Plenum Press, New York 1988

Authors and Affiliations

  • A. J. Hoeven
    • 1
  • J. S. C. Kools
    • 1
  • J. Aarts
    • 1
  • P. C. Zalm
    • 1
  1. 1.Philips Research LaboratoriesEindhovenThe Netherlands

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