Organic Insulators

  • Markus A. Zuegel
Part of the The IBM Research Symposia Series book series (IRSS)


Insulators in semiconductors serve two purposes: electrical insulation between metallization levels and electrical, chemical and mechanical passivation of the total semiconductor structure.


Metal Line Amic Acid Adhesion Promoter Water Permeation Polyamic Acid 
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Copyright information

© Plenum Press, New York 1984

Authors and Affiliations

  • Markus A. Zuegel
    • 1
  1. 1.International Business Machines CorporationSindelfingenW. Germany

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