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Organic Insulators

  • Markus A. Zuegel
Part of the The IBM Research Symposia Series book series (IRSS)

Abstract

Insulators in semiconductors serve two purposes: electrical insulation between metallization levels and electrical, chemical and mechanical passivation of the total semiconductor structure.

Keywords

Metal Line Amic Acid Adhesion Promoter Water Permeation Polyamic Acid 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1984

Authors and Affiliations

  • Markus A. Zuegel
    • 1
  1. 1.International Business Machines CorporationSindelfingenW. Germany

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