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Interface Chemistry and Structure of Schottky Barrier Formation

  • R. Z. Bachrach

Abstract

The current microscopic understanding of the interface chemistry and structure of Schottky barrier formation is described in this chapter. This chapter builds upon the physics of Schottky barriers presented in Chapter 1 and provides some background to the fabrication of Schottky barriers described in Chapter 3. The more recent investigations are discussed and the current status of the detailed picture we now have for metal-semiconductor barriers on group IV, III–V, and II–VI semiconductors is reviewed. In particular, this chapter emphasizes the pervasive importance of interfacial interdiffusion and interactions in metal-semiconductor systems. As will become apparent from the discussion below, many intrinsic aspects of Schottky barrier formation have been elucidated, but much detail remains to be unraveled in specific metal-semiconductor systems.

Keywords

Barrier Height Interfacial Layer Interface State Schottky Barrier Schottky Barrier Height 
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Copyright information

© Plenum Press, New York 1984

Authors and Affiliations

  • R. Z. Bachrach
    • 1
  1. 1.Xerox Palo Alto Research CenterPalo AltoUSA

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