Thin Film Reaction Induced by CW Scanned Laser and E-Beam
The reaction of thin metal films with both single and polysilicon to form silicide compounds has received wide attention in the past few-years. The properties of thin-film metal suicides formed at temperatures below the melting points of the components is of interest from both technological and fundamental aspects.
KeywordsSilicide Film Laser Power Level Energetic Beam Surface Color Change Read Camera
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