Laser Chemical Vapor Deposition

  • Susan D. Allen
Part of the NATO Advanced Study Institutes Series book series (NSSB, volume 84)


Laser chemical vapor deposition (LCVD) is an adaptation of conventional CVD using a laser heat source. As shown in Fig. 1, the laser is focused through a transparent window and the transparent gaseous reactants onto an absorbing substrate, creating a localized hot spot at which the deposition reaction takes place.


Incident Energy Optical Thickness Brewster Angle Thickness Profile Incident Laser Power 
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Copyright information

© Plenum Press, New York 1983

Authors and Affiliations

  • Susan D. Allen
    • 1
  1. 1.Center for Laser StudiesUniversity of Southern CaliforniaLos AngelesUSA

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