Ion Beam Analysis of Near Surface Regions

  • Salvatore Ugo Campisano
Part of the NATO Advanced Study Institutes Series book series (NSSB, volume 84)


The ion-atom collision is used as a tool to investigate solid surfaces1–5 . Composition and its depth dependence can be determined up to a thickness of about 1 pro with a resolution of the order of 0.01 μm using Rutherford backscattering (RBS) technique. The reduction of the yield due to the alignment of a low index axis of a single crystal target with the analyzing beam direction 1,6) can be used to determine the presence of defects, their natu re and amount. Other effects of the ion-atom collision1,5 as the emission of characteristics X-ray or of the product of a nuclear reaction, are used for analytical purposes too.


Energy Width Rutherford Backscattering Stop Cross Section Angular Profile Thin Film Bilayer 
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Copyright information

© Plenum Press, New York 1983

Authors and Affiliations

  • Salvatore Ugo Campisano
    • 1
  1. 1.Istituto di Struttura della Materia dell ’UniversitàCataniaItaly

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